Fabrication of ultra-high-Q Ta2O5 microdisks by photolithography-assisted chemo-mechanical etching von Li, Minghui, Zhao, Guanghui, Lin, Jintian, Gao, Renhong, Guan, Jianglin, Li, CHuntao, Qiao, Qian, Qiu, Yingnuo, Deng, Li, Qiao, Lingling, Wang, Min, Cheng, Ya

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Fabrication of ultra-high-Q Ta 2 O 5 microdisks by photolithography-assisted chemo-mechanical etching von Li, Minghui, Zhao, Guanghui, Lin, Jintian, Gao, Renhong, Guan, Jianglin, Li, CHuntao, Qiao, Qian, Qiu, Yingnuo, Deng, Li, Qiao, Lingling, Wang, Min, Cheng, Ya

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Quality factor testing of thin film lithium niobate FP cavity von Qian, Qiao, Jintian, Lin, Renhong, Gao, Guanjianglin, Chuntao, Li, Guanghui, Zhao, Xinzhi, Zheng, Minghui, Li, Qifeng, Hou, Xiaochao, Luo, Yingnuo, Qiu, Lingling, Qiao, Min, Wang, Ya, Cheng

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