Thin Near-Surface Layer in a Resist Film von Trigub, V. I., Plotnov, A. V., Kiselev, A. N.

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A change in the structure of an ultrasonically processed MMA-MAA based photoresist von Trigub, V. I., Plotnov, A. V.

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A thin subsurface layer of a polymer film studied by atomic force microscopy von Trigub, V. I., Plotnov, A. V., Kiselev, A. N.

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