Enhancement of reflectivity of multilayer mirrors for soft x-ray projection lithography by temperature optimization and ion bombardment von Louis, E., Voorma, H.-J., Koster, N.B., Shmaenok, L., Bijkerk, F., Schlatmann, R., Verhoeven, J., Platonov, Yu.Ya, van Dorssen, G.E., Padmore, H.A.

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Multilayer dispersion optics for X-ray radiation von Andreev, S.S, Mertins, H.-Ch, Platonov, Yu.Ya, Salashchenko, N.N, Schaefers, F, Shamov, E.A, Shmaenok, L.A

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Multilayer X-ray optics for synchrotron radiation von Salashchenko, N.N., Platonov, Yu.Ya, Zuev, S.Yu

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Determination of layered synthetic microstructure parameters von Akhsakhalyan, A.D., Fraerman, A.A., Polushkin, N.I., Platonov, Yu.Ya, Salashchenko, N.N.

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Multilayer coated reflective optics for Extreme UV lithography von Louis, E., Voorma, H.-J., Koster, N.B., Bijkerk, F., Platonov, Yu.Ya, Zuev, S.Yu, Andreev, S.S., Shamov, E.A., Salashchenko, N.N.

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Soft X-Ray Emission from Millimeter-Wave Electron Cyclotron Resonance Discharge von Golubev, S.V., Platonov, Yu.Ya, Razin, S.V., Zorin, V.G.

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New modification of X-ray standing waves above the surface of layered substrates under total external reflection conditions for structural characterization of organic layers von Zheludeva, S.I., Kovalchuk, M.V., Novikova, N.N., Sosphenov, A.N., Malysheva, N.E., Salashchenko, N.N., Akhsakhalyan, A.D., Platonov, Yu.Ya

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Multilayer EUV/X-ray polychromators for plasma diagnostics von Shmaenok, L.A., Platonov, Yu.Ya, Salashchenko, N.N., Sorokin, A.A., Simanovskii, D.M., Golubev, A.V., Belik, V.P., Bobashev, S.V., Bijkerk, F., Louis, E., Meijer, F.G., Etlicher, B., Grudsky, A.Ya

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Extreme UV lithography: A new laser plasma target concept and fabrication of multilayer reflection masks von Bijkerk, F., Shmaenok, L.A., Louis, E., Voorma, H.J., Koster, N.B., Bruineman, C., Bastiaensen, R.K.F.J., van der Drift, E.W.J.M., Romijn, J., de Groot, L.E.M., Rousseeuw, B.A.C., Zijlstra, T., Platonov, Yu.Ya, Salashchenko, N.N.

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Diffusion in multilayer structures of metal-carbon superthin films von Akhsakhalyan, A.D., Fraerman, A.A., Platonov, Yu.Ya, Polushkin, N.I., Salashchenko, N.N.

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Multilayer X-ray mirrors for the wavelength range 25–44 Å von Akhsakhalyan, A.D., Gaponov, S.V., Gusev, S.A., Platonov, Yu.Ya, Salashchenko, N.N., Polushkin, N.I.

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