Stability of carbon nitride films prepared from volatile CN species via atomic transport reactions von Popov, C., Plass, M.F., Zambov, L., Kulisch, W.

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A concept for the deposition of adherent cubic boron nitride films von Kulisch, W, Freudenstein, R, Klett, A, Plass, M.F

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Optical, electrical and mechanical properties of nitrogen-rich carbon nitride films deposited by inductively coupled plasma chemical vapor deposition von Popov, C, Zambov, L.M, Plass, M.F, Kulisch, W

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Stress of c-BN thin films: a parameter investigation von Klett, A., Freudenstein, R., Plass, M.F., Kulisch, W.

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Synthesis of carbon nitride films by low-power inductively coupled plasma-activated transport reactions from a solid carbon source von POPOV, C, PLASS, M. F, BERGMAIER, A, KULISCH, W

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Plasma chemical vapor deposition of thin carbon nitride films utilizing transport reactions von Popov, C, Plass, M.F, Kassing, R, Kulisch, W

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Capacitance humidity sensor with carbon nitride detecting element von ZAMBOV, L. M, POPOV, C, PLASS, M. F, BOCK, A, JELINEK, M, LANCOK, J, MASSELI, K, KULISCH, W

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Correlation between photoluminescence, optical and structural properties of amorphous nitrogen-rich carbon nitride films von PLASS, M. F, POPOV, C, IVANOV, B, MÄNDL, S, JELINEK, M, ZAMBOV, L. M, KULISCH, W

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Correlation between stress values of cubic boron nitride thin films and intrinsic film properties or the infrared peak position von Klett, A., Freudenstein, R., Plass, M.F., Kulisch, W.

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The effect of d.c. substrate bias on the properties of nitrogen-rich CNx films von Popov, C., Plass, M.F., Zambov, L.M., Kulisch, W.

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The effect of d.c. substrate bias on the properties of nitrogen-rich CN x films von Popov, C., Plass, M.F., Zambov, L.M., Kulisch, W.

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Correlation between stress profiles of cubic boron nitride thin films and the phase sequence revealed from infrared data von KLETT, A, MALAVE, A, FREUDENSTEIN, R, PLASS, M. F, KULISCH, W

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Depth resolved stress investigations of c-BN thin films von Klett, A., Freudenstein, R., Plass, M.F., Kulisch, W.

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Physical properties of carbon nitride films synthesized using atomic transport reactions von Popov, C, Plass, M.F, Zambov, L, Bulir, J, Delplancke-Ogletree, M.-P, Kulisch, W

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Layered growth of boron nitride thin films von Plass, M.F., Fukarek, W., Kolitsch, A., Schell, N., Möller, W.

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Growth and characterisation of boron nitride thin films von Plass, M.F., Fukarek, W., Kolitsch, A., Kreiβig, U.

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In situ characterization of cubic boron nitride film growth in the IR spectral region von Barth, K.-L, Fukarek, W, Maucher, H.-P, Plass, M.F, Lunk, A

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Growth and characterisation of boron nitride films: layer sequence and phase identification von Plass, M.F., Fukarek, W., Kolitsch, A., Möller, W.

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Layered structure diagnostic and optical modelling of c-BN films von Plass, M.F., Fukarek, W., Kolitsch, A., Möller, W.

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Infrared Analysis of Boron Nitride Thin Films von Kolitsch, Andreas, Plass, M.F., Möller, W., Fukarek, W.

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