Light intensification modeling of coating inclusions irradiated at 351 and 1053 nm von Stolz, Christopher J, Hafeman, Scott, Pistor, Thomas V

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Laser intensification by spherical inclusions embedded within multilayer coatings von Stolz, Christopher J, Feit, Michael D, Pistor, Thomas V

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Searching for optimal mitigation geometries for laser-resistant multilayer high-reflector coatings von Qiu, S Roger, Wolfe, Justin E, Monterrosa, Anthony M, Feit, Michael D, Pistor, Thomas V, Stolz, Christopher J

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Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects von Upadhyaya, Mihir, Basavalingappa, Adarsh, Herbol, Henry, Denbeaux, Gregory, Jindal, Vibhu, Harris-Jones, Jenah, Jang, Il-Yong, Goldberg, Kenneth A., Mochi, Iacopo, Marokkey, Sajan, Demmerle, Wolfgang, Pistor, Thomas V.

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Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects von Upadhyaya, Mihir, Basavalingappa, Adarsh, Herbol, Henry, Denbeaux, Gregory, Jindal, Vibhu, Harris-Jones, Jenah, Jang, Il-Yong, Goldberg, Kenneth A., Mochi, Iacopo, Marokkey, Sajan, Demmerle, Wolfgang, Pistor, Thomas V.

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Searching for Optimal Mitigation Geometry for Multilayer High Reflector Coatings von Qiu, S. Roger, Wolfe, Justin E., Monterrosa, Anthony M., Feit, Michael D., Pistor, Thomas V., Stolz, Christopher J.

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