Structure and stressed state of molybdenum layers in Mo/Si multilayers von Pinegyn, V.I., Zubarev, E.N., Kondratenko, V.V., Sevryukova, V.A., Yulin, S.A., Feigl, T., Kaiser, N.

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The structure, diffusion and phase formation in Mo/Si multilayers with stressed Mo layers von Zubarev, E.N., Zhurba, A.V., Kondratenko, V.V., Pinegyn, V.I., Sevryukova, V.A., Yulin, S.A., Feigl, T., Kaiser, N.

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