Micro-pattern Corrosion Screening on Bimetallic Corrosion for Microelectronic Application von Yu, Kyle Kai-Hung, Rimal, Sirish, Asokan, Muthappan, Nalla, Praveen R., Koskey, Simon, Pillai, Karthikeyan S.M., Chyan, Oliver, Singh, Kanwal Jit, Suri, Satyarth

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Study of bimetallic corrosion related to Cu interconnects using micropattern corrosion screening method and Tafel plots von Yu, Kyle Kai-Hung, Pillai, Karthikeyan S. M., Nalla, Praveen R., Chyan, Oliver

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Study of Cu Bimetallic Corrosion in CMP Chemical Environments Using Optical Scanning and Micropattern Corrosion Screening von Yu, Kyle, Thomas, Nicole, Venkataraman, Shyam S., Pillai, Karthikeyan S., Hurd, Trace, Boggs, Karl, Chyan, Oliver

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Characterization of Post Etch Residues on Patterned Porous Low-k Dielectric Using Multiple Internal Reflection Infrared Spectroscopy von Rimal, Sirish, Ross, Nick, Pillai, Karthikeyan S., Singh, Kanwal Jit, Chyan, Oliver

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Cu Electrodeposition on Ru-Ta Alloy Thin Films von S.M. Pillai, Karthikeyan, Yu, Kyle, Chyan, Oliver

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