Hybrid metrology for nanometric energy harvesting devices von Siaudinyte, Lauryna, Hansen, P-E, Koops, R, Xu, J, Peiner, E

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Thermoelectric Properties of High-Doped Silicon from Room Temperature to 900 K von Stranz, A., Kähler, J., Waag, A., Peiner, E.

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Self-diffusion in single crystalline silicon nanowires von Südkamp, T., Hamdana, G., Descoins, M., Mangelinck, D., Wasisto, H. S., Peiner, E., Bracht, H.

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Self-reading femtogram microbalance for highly sensitive airborne nanoparticle detection von Bertke, M, Xu, J, Setiono, A, Hamdana, G, Wasisto, H S, Peiner, E

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Thermoelectric and Structural Properties of Zr-/Hf-Based Half-Heusler Compounds Produced at a Large Scale von Zillmann, D., Waag, A., Peiner, E., Feyand, M.-H., Wolyniec, A.

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Measurements of thermoelectric properties of silicon pillars von Stranz, A., Sökmen, Ü., Kähler, J., Waag, A., Peiner, E.

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Capabilities of ICP-RIE cryogenic dry etching of silicon: review of exemplary microstructures von Sökmen, Ü, Stranz, A, Fündling, S, Wehmann, H-H, Bandalo, V, Bora, A, Tornow, M, Waag, A, Peiner, E

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Enhancement of real-time resonance tracking in electrothermally actuated cantilever sensor with optimized phase characteristic von Setiono, A, Xu, J, Fahrbach, M, Bertke, M, Ombati Nyang'au, W, Wasisto, H S, Peiner, E

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Production of vertical nanowire resonators by cryogenic-ICP–DRIE von Merzsch, S., Steib, F., Wasisto, H. S., Stranz, A., Hinze, P., Weimann, T., Peiner, E., Waag, A.

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Design and fabrication of AlN-on-Si chirped surface acoustic wave resonators for label-free cell detection von Syamsu, I, Granz, T, Scholz, G, Mariana, S, Yulianto, N, Daul, L, Koenders, L, Triyana, K, Daniel Prades, J, Peiner, E, Waag, A, Wasisto, H S

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Angle-dependent spin-wave resonance spectroscopy of (Ga,Mn)As films von Dreher, L., Bihler, C., Peiner, E., Waag, A., Schoch, W., Limmer, W., Goennenwein, S. T. B., Brandt, M. S.

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Slender Tactile Sensor for Contour and Roughness Measurements Within Deep and Narrow Holes von Peiner, E., Balke, M., Doering, L.

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Partially integrated cantilever-based airborne nanoparticle detector for continuous carbon aerosol mass concentration monitoring von Wasisto, H S, Merzsch, S, Uhde, E, Waag, A, Peiner, E

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Adsorption and detection of microparticles using silicon microcantilevers von Ombati Nyang'au, W, Hamdana, G, Setiono, A, Bertke, M, Xu, J, Fahrbach, M, Puranto, P, Wasisto, H S, Peiner, E

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Micro force sensor with piezoresistive amorphous carbon strain gauge von Peiner, E., Tibrewala, A., Bandorf, R., Biehl, S., Lüthje, H., Doering, L.

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Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications von Sökmen, Ü, Stranz, A, Waag, A, Ababneh, A, Seidel, H, Schmid, U, Peiner, E

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Transport and optical properties of amorphous carbon and hydrogenated amorphous carbon films von Tibrewala, A., Peiner, E., Bandorf, R., Biehl, S., Lüthje, H.

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Shallow and deep dry etching of silicon using ICP cryogenic reactive ion etching process von Sökmen, Ü., Stranz, A., Fündling, S., Merzsch, S., Neumann, R., Wehmann, H.-H., Peiner, E., Waag, A.

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Tactile probes for dimensional metrology with microcomponents at nanometre resolution von Peiner, E, Balke, M, Doering, L, Brand, U

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Nanowire silicon as a material for thermoelectric energy conversion von Stranz, A., Kähler, J., Merzsch, S., Waag, A., Peiner, E.

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