Sub-2 nm boron doping in silicon using novel ultra-thin SiO2 film produced by sol–gel dip coating as a capping layer von Peranantham, Pazhanisami, Jeyachandran, Yekkoni Lakshmanan

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Sub-2 nm boron doping in silicon using novel ultra-thin SiO 2 film produced by sol–gel dip coating as a capping layer von Peranantham, Pazhanisami, Jeyachandran, Yekkoni Lakshmanan

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Fabrication of a bilayer wire grid polarizer in the near infrared wavelength region by using a UV curing nanoimprinting method von Lee, Yong Ho, Peranantham, Pazhanisami, Hwangbo, Chang Kwon, Kim, Seok-Min

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Determination of Optical Constants of Thin Films in Extreme Ultraviolet Wavelength Region by an Indirect Optical Method von Kang, Hee Young, Lim, Jai Dong, Peranantham, Pazhanisami, HwangBo, Chang Kwon

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Label-free monitoring of immuno-specific interactions of adsorbed multilayer of proteins von Peranantham, Pazhanisami, Gopi, Kadalore Ramalingam, Jeyachandran, Yekkoni Lakshmanan

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Binary mask designs with single- and double-layer absorber stacks for extreme ultraviolet lithography and actinic inspection von Park, Sungjin, Lim, Jai Dong, Peranantham, Pazhanisami, Kang, Hee Young, Hwangbo, Chang Kwon, Lee, SuYoung, Kim, Seong-Su

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Determination of Optical Constants of Thin Films in Extreme Ultraviolet Wavelength Region by an Indirect Optical Method von Hee Young Kang, Jai Dong Lim, Pazhanisami Peranantham, Chang Kwon Hwangbo

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