Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film von Parsapour, Fazel, Pashchenko, Vladimir, Chambon, Hugo, Nicolay, Pascal, Bleyl, Ingo, Roesler, Ulrike, Muralt, Paul

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Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces von Sandu, Cosmin Silviu, Parsapour, Fazel, Mertin, Stefan, Pashchenko, Vladimir, Matloub, Ramin, LaGrange, Thomas, Heinz, Bernd, Muralt, Paul

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Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling von Parsapour, Fazel, Pashchenko, Vladimir, Kurz, Nicolas, Sandu, Cosmin Silviu, LaGrange, Thomas, Yamashita, Kaoru, Lebedev, Vadim, Muralt, Paul

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Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces (Phys. Status Solidi A 2∕2019) von Sandu, Cosmin Silviu, Parsapour, Fazel, Mertin, Stefan, Pashchenko, Vladimir, Matloub, Ramin, LaGrange, Thomas, Heinz, Bernd, Muralt, Paul

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Growth, Integration, and Functional Characterization of AlScN Thin Films for RF MEMS Devices von Parsapour, Fazel

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