Helium electron beam rf plasma for low-k surface functionalization von Voronina, Ekaterina N., Sycheva, Anastasia A., Solovykh, Alexander A., Proshina, Olga V., Rakhimova, Tatyana V., Palov, Alexander A. P., Rakhimov, Alexander T.

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Non‐self‐sustained electron beam RF‐generated plasma in application for functional surface pretreatment von Palov, Alexander P., Proshina, Olga V., Rakhimova, Tatyana V., Rakhimov, Alexander T., Voronina, Ekaterina N.

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Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity von Palov, Alexander P., Baklanov, Mikhail R., Wei, Shuhua

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Temperature evolution of organosilicate glass films with organic bridges von Vishnevskiy, Alexey S., Seregin, Dmitry S., Palov, Alexander P., Orlov, Georgy A., Yakushev, Vladislav A., Ovchinnikov, Ivan S., Vorotilov, Konstantin A., Baklanov, Mikhail R.

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Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiOx films von Mankelevich, Yuri A, Voronina, Ekaterina N, Rakhimova, Tatyana V, Palov, Alexander P, Lopaev, Dmitry V, Zyryanov, Sergey M, Baklanov, Mikhail R

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Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach von Palov, Alexander P., Voronina, Ekaterina N., Rakhimova, Tatyana V., Lopaev, Dmitri V., Zyryanov, Sergey M., Mankelevich, Yuri A., Krishtab, Mikhail B., Baklanov, Mikhail R.

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Fluorine atoms interaction with the nanoporous materials: experiment and DFT simulation von Mankelevich, Yuri A., Voronina, Ekaterina N., Rakhimova, Tatyana V., Palov, Alexander P., Lopaev, Dmitry V., Zyryanov, Sergey M., Baklanov, Mikhail R.

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Sputtering of Si by Ar: A binary collision approach based on quantum-mechanical cross sections von Palov, Alexander P., Balint-Kurti, Gabriel G., Voronina, Ekaterina N., Rakhimova, Tatyana V.

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Etching low-k films by F atoms: Inside view von Palov, Alexander P., Rakhimova, Tatyana V., Voronina, Ekaterina N., Mankelevich, Yuri A.

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Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films von Voronina, Ekaterina N., Mankelevich, Yuri A., Rakhimova, Tatyana V., Palov, Alexander P., Lopaev, Dmitry V., Zyryanov, Sergey M., Zotovich, Alexey I., Baklanov, Mikhail R.

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Properties of organosilicate low-k films with 1,3- and 1,3,5-benzene bridges between Si atoms von Liu, Chunhui, Lv, Chunguang, Kohler, Nicole, Wang, Xuesong, Lin, Hongxiao, He, Zhiwei, Wu, Yu-Hsuan, Leu, Jihperng, Wei, Shuhua, Zhang, Jing, Yan, Jiang, Palov, Alexander P., Baklanov, Mikhail R.

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Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiO von Mankelevich, Yuri A, Voronina, Ekaterina N, Rakhimova, Tatyana V, Palov, Alexander P, Lopaev, Dmitry V, Zyryanov, Sergey M, Baklanov, Mikhail R

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Modification of Porous Ultralow‑k Film by Vacuum Ultraviolet Emission von Zotovich, Alexey I., Zyryanov, Sergey M., Lopaev, Dmitry V., Rezvanov, Askar A., Attallah, Ahmed G., Liedke, Maciej O., Butterling, Maik, Bogdanova, Maria A., Vishnevskiy, Alexey S., Seregin, Dmitry S., Vorotyntsev, Dmitry A., Palov, Alexander P., Hirschmann, Eric, Wagner, Andreas, Naumov, Sergej, Vorotilov, Konstantin A., Rakhimova, Tatyana V., Rakhimov, Alexander T., Baklanov, Mikhail R.

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Vibrationally-rotationally inelastic cross sections for H+SiO collisions von Palov, Alexander P., Jimeno, Pedro, Gray, Malcolm D., Field, David, Balint-Kurti, G. G.

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Data publication: Modification of Porous Ultralow‑k Film by Vacuum Ultraviolet Emission von Zotovich, Alexey I., Zyryanov, Sergey M., Lopaev, Dmitry V., Rezvanov, Askar A., Attallah, Ahmed Gamal, Liedke, Maciej Oskar, Butterling, Maik, Bogdanova, Maria A., Vishnevskiy, Alexey S., Seregin, Dmitry S., Vorotyntsev, Dmitry A. Vorotyntsev, Palov, Alexander P., Hirschmann, Eric, Wagner, Andreas, Naumov, Sergej, Vorotilov, Konstantin A., Rakhimova, Tatyana V., Rakhimov, Alexander T. R., Baklanov, Mikhail

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Data publication: Modification of Porous Ultralow‑k Film by Vacuum Ultraviolet Emission von Zotovich, Alexey I., Zyryanov, Sergey M., Lopaev, Dmitry V., Rezvanov, Askar A., Attallah, Ahmed Gamal, Liedke, Maciej Oskar, Butterling, Maik, Bogdanova, Maria A., Vishnevskiy, Alexey S., Seregin, Dmitry S., Vorotyntsev, Dmitry A. Vorotyntsev, Palov, Alexander P., Hirschmann, Eric, Wagner, Andreas, Naumov, Sergej, Vorotilov, Konstantin A., Rakhimova, Tatyana V., Rakhimov, Alexander T. R., Baklanov, Mikhail

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