Experimental study of Si3N4 viscosity for calibration of stress-dependent models of silicon oxidation von LOIKO, K. V, PEIDOUS, I. V, YUE ZU, HO, H.-M

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Active corner engineering in the process integration for shallow trench isolation von Balasubramanian, N., Johnson, E., Peidous, I. V., Ming-Jr, Shiu, Sundaresan, R.

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Stress-Induced Redistribution of Point Defects in Silicon Device Structures von Loiko, K.V., Harrington, T.E., Frensley, W.R., Peidous, I.V.

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The Effect of Intrinsic Point Defects upon Dislocation Motion in Silicon von Loiko, K.V., Huff, Howard R., Frensley, W.R., Peidous, I.V., Simpson, D.A.

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Experimental study and simulation of stress-induced cavities in silicon von LOIKO, K. V, PEIDOUS, I. V, FRENSLEY, W. R

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SOI and Bulk FinFET Alternatives from the Perspective of Strain Engineering von Peidous, Igor V, Lottes, Charles, Jost, Christopher

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SOI and Bulk FinFET Alternatives from the Perspective of Strain Engineering von Peidous, Igor V, Lottes, Charles, Jost, Christopher

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Experimental Study of Si3 N 4 Viscosity for Calibration of Stress‐Dependent Models of Silicon Oxidation von Loiko, Konstantin V., Peidous, Igor V., Zu, Yue, Ho, Hok‐Min

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Methods of forming a metal silicide region in an integrated circuit von WARD MICHAEL G, PEIDOUS IGOR V

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METHODS OF FORMING A METAL SILICIDE REGION IN AN INTEGRATED CIRCUIT von PEIDOUS, IGOR V, WARD, MICHAEL G

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METHODS OF FORMING A METAL SILICIDE REGION IN AN INTEGRATED CIRCUIT von WARD MICHAEL G, PEIDOUS IGOR V

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METHODS OF FORMING A METAL SILICIDE REGION IN AN INTEGRATED CIRCUIT von PEIDOUS, IGOR V, WARD, MICHAEL G

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SUB-QUARTER-MICRON MOSFET AND METHOD OF ITS MANUFACTURING von IGOR V. PEIDOUS

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Method and mask structure for self-aligning ion implanting to form various device structures von PEIDOUS IGOR V

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Methods to adjust threshold voltage in semiconductor devices von WARD MICHAEL G, CHIANG SUNNY, SRINIVASAN SWAMINATHAN, TA YEN B, PORSHNEV PETER I, PEIDOUS IGOR V, DARLAK ANDREW

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Shallow trench isolation of mosfets with reduced corner parasitic currents von PEIDOUS, IGOR, V

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Sub-quarter-micron MOSFET and method of its manufacturing von PEIDOUS, IGOR V

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Method and mask structure for self-aligning ion implanting to form various device structures von PEIDOUS, IGOR V

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Method and mask structure for self-aligning ion implanting to form various device structures von PEIDOUS, IGOR V

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Method and mask structure for self-aligning ion implanting to form various device structures von PEIDOUS, IGOR V

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