Atomic Layer Deposition of Silicon Dioxide Using Aminosilanes Di-sec-butylaminosilane and Bis(tert-butylamino)silane with Ozone von Peña, Luis Fabián, Nanayakkara, Charith E, Mallikarjunan, Anupama, Chandra, Haripin, Xiao, Manchao, Lei, Xinjian, Pearlstein, Ronald M, Derecskei-Kovacs, Agnes, Chabal, Yves J

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In Situ Infrared Absorption Study of Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride von Peña, Luis Fabián, Mattson, Eric C, Nanayakkara, Charith E, Oyekan, Kolade A, Mallikarjunan, Anupama, Chandra, Haripin, Xiao, Manchao, Lei, Xinjian, Pearlstein, Ronald M, Derecskei-Kovacs, Agnes, Chabal, Yves J

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Density functional theory study on the full ALD process of silicon nitride thin film deposition via BDEAS or BTBAS and NH3 von Huang, Liang, Han, Bo, Han, Bing, Derecskei-Kovacs, Agnes, Xiao, Manchao, Lei, Xinjian, O'Neill, Mark L, Pearlstein, Ronald M, Chandra, Haripin, Cheng, Hansong

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Role of Trimethylaluminum in Low Temperature Atomic Layer Deposition of Silicon Nitride von Dangerfield, Aaron, Nanayakkara, Charith E, Mallikarjunan, Anupama, Lei, Xinjian, Pearlstein, Ronald M, Derecskei-Kovacs, Agnes, Cure, Jeremy, Estève, Alain, Chabal, Yves J

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First-Principles Study of a Full Cycle of Atomic Layer Deposition of SiO2 Thin Films with Di(sec-butylamino)silane and Ozone von Huang, Liang, Han, Bo, Han, Bing, Derecskei-Kovacs, Agnes, Xiao, Manchao, Lei, Xinjian, O’Neill, Mark L, Pearlstein, Ronald M, Chandra, Haripin, Cheng, Hansong

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High Gas Storage Capacities for Ionic Liquids through Chemical Complexation von Tempel, Daniel J, Henderson, Philip B, Brzozowski, Jeffrey R, Pearlstein, Ronald M, Cheng, Hansong

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Solid State Lithium Cyanocobaltates with a High Capacity for Reversible Dioxygen Binding: Synthesis, Reactivity, and Structures von Ramprasad, Dorai, Pez, Guido P, Toby, Brian H, Markley, Thomas J, Pearlstein, Ronald M

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Designing high performance precursors for atomic layer deposition of silicon oxide von Mallikarjunan, Anupama, Chandra, Haripin, Xiao, Manchao, Lei, Xinjian, Pearlstein, Ronald M., Bowen, Heather R., O'Neill, Mark L., Derecskei-Kovacs, Agnes, Han, Bing

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Density functional theory study on the full ALD process of silicon nitride thin film deposition viaBDEAS or BTBAS and NH sub(3) von Huang, Liang, Han, Bo, Han, Bing, Derecskei-Kovacs, Agnes, Xiao, Manchao, Lei, Xinjian, O'Neill, Mark L, Pearlstein, Ronald M, Chandra, Haripin, Cheng, Hansong

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New Synthesis Routes to Lithium and Cesium Cyanide Salts von Markley, Thomas J, Toby, Brian H, Pearlstein, Ronald M, Ramprasad, Dorai

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Density functional theory study on the full ALD process of silicon nitride thin film deposition via BDEAS or BTBAS and NH 3 von Huang, Liang, Han, Bo, Han, Bing, Derecskei-Kovacs, Agnes, Xiao, Manchao, Lei, Xinjian, O'Neill, Mark L., Pearlstein, Ronald M., Chandra, Haripin, Cheng, Hansong

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First-Principles Study of a Full Cycle of Atomic Layer Deposition of SiO 2 Thin Films with Di( sec -butylamino)silane and Ozone von Huang, Liang, Han, Bo, Han, Bing, Derecskei-Kovacs, Agnes, Xiao, Manchao, Lei, Xinjian, O’Neill, Mark L., Pearlstein, Ronald M., Chandra, Haripin, Cheng, Hansong

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Tetrabutylammonium Tetracyanocobaltate(II) Dioxygen Carriers von Meier, Ingrid K, Pearlstein, Ronald M, Ramprasad, Dorai, Pez, Guido P

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In-situ IR Absorption Study of Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride von Peña, Luis Fabián, Mattson, Eric C, Nanayakkara, Charith E, Oyekan, Kolade A, Mallikarjunan, Anupama, Chandra, Haripin, Xiao, Manchao, Lei, Xinjian, Pearlstein, Ronald M, Derecskei-Kovacs, Agnes, Chabal, Yves J

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SELECTIVE DEPOSITION ON SILICON CONTAINING SURFACES von PEARLSTEIN, Ronald Martin

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Selective deposition on silicon containing surfaces von Pearlstein, Ronald Martin

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SELECTIVE DEPOSITION ON SILICON CONTAINING SURFACES von PEARLSTEIN, Ronald Martin

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SELECTIVE DEPOSITION OF SILICON DIELECTRIC FILM von LEI, Xinjian, CHANDRA, Haripin, PEARLSTEIN, Ronald M

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SELECTIVE DEPOSITION ON SILICON CONTAINING SURFACES von PEARLSTEIN, Ronald Martin

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SELECTIVE DEPOSITION OF SILICON DIELECTRIC FILM von LEI, XINJIAN, CHANDRA, HARIPIN, PEARLSTEIN, RONALD M

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