CMOS integrated process for fabricating monocrystalline silicon micromechanical elements by porous silicon micromachining von VAZSONYI EVA, ADAM ANTALNE, EROS MAGDOLNA, DUCSO CSABA, PAYER KAROLYNE, MOHACSY TIBOR, BARSONY ISTVAN

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MONOLITHICALLY INTEGRATED MONOCRYSTALLINE MICROMECHANICAL ELEMENTS von DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE

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METHOD FOR PRODUCING MICROMECHANICAL ELEMENTS CAN BE INTEGRATED INTO CMOS TECHNOLOGY, CARRYING MONOLITH SI AND MONOLITH SIO PRODUCED BY POROUS SI MICROMANUFACTURING PROCESS von VAZSONYI EVA, ADAM ANTALNE, DUECSOE CSABA, PAYER KAROLYNE, MOHACSY TIBOR, BARSONY ISTVAN, EROES MAGDOLNA

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CMOS INTEGRATED PROCESS FOR FABRICATING MONOCRYSTALLINE SILICON MICROMECHANICAL ELEMENTS BY POROUS SILICON MICROMACHINING AND SENSOR CHIP COMPRISING SUCH ELEMENT von DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE

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CMOS INTEGRATED PROCESS FOR FABRICATING MONOCRYSTALLINE SILICON von DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE

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METHOD FOR FORMING METAL NET OF INTEGRATED CIRCUITS von PAYER,KAROLYNE,HU, B.VAZSONYI,EVA,HU, ZIMMER,GYOERGY,HU

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CMOS integrated process for fabricating monocrystalline silicon micromechanical elements by porous silicon micromachining von Ádám, Antalné, Barsony, István, Ducso, Csaba, Eros, Magdolna, Mohacsy, Tibor, Payer, Károlyné, Vazsonyi, Eva

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