Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators von Candler, R.N., Hopcroft, M.A., Bongsang Kim, Woo-Tae Park, Melamud, R., Agarwal, M., Yama, G., Partridge, A., Lutz, M., Kenny, T.W.

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Introduction to the Special Issue From the 2015 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum von Partridge, Aaron

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Silicon MEMS Oscillators for High-Speed Digital Systems von Tabatabaei, Sassan, Partridge, Aaron

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A Temperature-to-Digital Converter for a MEMS-Based Programmable Oscillator With < ±0.5-ppm Frequency Stability and < 1-ps Integrated Jitter von PERROTT, Michael H, SALVIA, James C, PAMARTI, Sudhakar, LEE, Haechang, ASSADERAGHI, Fari, LEE, Fred S, PARTRIDGE, Aaron, MUKHERJEE, Shouvik, ARFT, Carl, KIM, Jintae, ARUMUGAM, Niveditha, GUPTA, Pavan, TABATABAEI, Sassan

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Silison MEMS Oscillators for high-speed digital systems von Tabatabaei, Sassan, Partridge, Aaron

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Impact of geometry on thermoelastic dissipation in micromechanical resonant beams von Candler, R.N., Duwel, A., Varghese, M., Chandorkar, S.A., Hopcroft, M.A., Woo-Tae Park, Bongsang Kim, Yama, G., Partridge, A., Lutz, M., Kenny, T.W.

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Method for adjusting the frequency of a MEMS resonator von Lutz, Markus, Partridge, Aaron

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A MEMS-Assisted Temperature Sensor With 20- \mu \text Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2 von Heidarpour Roshan, Meisam, Zaliasl, Samira, Joo, Kimo, Souri, Kamran, Palwai, Rajkumar, Chen, Lijun Will, Singh, Amanpreet, Pamarti, Sudhakar, Miller, Nicholas J., Doll, Joseph C., Arft, Carl, Tabatabaei, Sassan, Sechen, Carl, Partridge, Aaron, Menon, Vinod

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Session 6 overview / IMMD: Sensors & energy harvesting von Partridge, Aaron, Hagleitner, Christoph

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A high-performance planar piezoresistive accelerometer von Partridge, A., Reynolds, J.K., Chui, B.W., Chow, E.M., Fitzgerald, A.M., Zhang, L., Maluf, N.I., Kenny, T.W.

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A Temperature-to-Digital Converter for a MEMS-Based Programmable Oscillator With Frequency Stability and Integrated Jitter von Perrott, M. H., Salvia, J. C., Lee, F. S., Partridge, A., Mukherjee, S., Arft, C., Jintae Kim, Arumugam, N., Gupta, P., Tabatabaei, S., Pamarti, S., Haechang Lee, Assaderaghi, F.

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A Temperature-to-Digital Converter for a MEMS-Based Programmable Oscillator With $< \pm \hbox{0.5-ppm}$ Frequency Stability and $< \hbox{1-ps}$ Integrated Jitter von Perrott, Michael H., Salvia, James C., Lee, Fred S., Partridge, Aaron, Mukherjee, Shouvik, Arft, Carl, Kim, Jintae, Arumugam, Niveditha, Gupta, Pavan, Tabatabaei, Sassan, Pamarti, Sudhakar, Lee, Haechang, Assaderaghi, Fari

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A Temperature-to-Digital Converter for a MEMS-Based Programmable Oscillator With < plus or minus hbox 0.5 - ppm Frequency Stability and < hbox 1 - ps Integrated Jitter von Perrott, Michael H, Salvia, James C, Lee, Fred S, Partridge, Aaron, Mukherjee, Shouvik, Arft, Carl, Kim, Jintae, Arumugam, Niveditha, Gupta, Pavan, Tabatabaei, Sassan, Pamarti, Sudhakar, Lee, Haechang, Assaderaghi, Fari

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Encapsulated submillimeter piezoresistive accelerometers von Woo-Tae Park, Partridge, A., Candler, R.N., Ayanoor-Vitikkate, V., Yama, G., Lutz, M., Kenny, T.W.

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Process compatible polysilicon-based electrical through-wafer interconnects in silicon substrates von Chow, E.M., Chandrasekaran, V., Partridge, A., Nishida, T., Sheplak, M., Quate, C.F., Kenny, T.W.

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Frequency compensated oscillator design for process tolerances von Partridge, Aaron, Lutz, Markus

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Design of Piezoresistive MEMS-Based Accelerometer for Integration with Wireless Sensing Unit for Structural Monitoring von Lynch, Jerome P, Partridge, Aaron, Law, Kincho H, Kenny, Thomas W, Kiremidjian, Anne S, Carryer, Ed

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MEMS resonator system von Partridge, Aaron, Gupta, Pavan, Lutz, Markus

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MICROMECHANICAL STRUCTURE WITH BONDED COVER von Partridge, Aaron, Lutz, Markus, Gupta, Pavan

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STACKED-DIE MEMS RESONATOR von Partridge, Aaron, Gupta, Pavan, Lutz, Markus

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