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  1. 1
    Piezoresistive CMOS-MEMS pressure sensor with ring oscillator readout including /spl Delta/-/spl Sigma/ analog-to-digital converter on-chip

    Piezoresistive CMOS-MEMS pressure sensor with ring oscillator readout including /spl Delta/-/spl Sigma/ analog-to-digital converter on-chip von Oysted, K., Wisland, D.T.


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  2. 2
    A fully integrated CMOS-MEMS pressure sensor with on-chip /spl Delta/-/spl Sigma/ analog-to-digital converter

    A fully integrated CMOS-MEMS pressure sensor with on-chip /spl Delta/-/spl Sigma/ analog-to-digital converter von Wisland, D.T., Oysted, K.

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