Novel Ion Implantation Process with High Heat Resistant Photoresist in Silicon Carbide Device Fabrication von Fujiwara, Takanori, Tanigaki, Yugo, Furukawa, Yukihiro, Tonari, Kazuhiro, Otsuki, Akihiro, Imai, Tomohiro, Oose, Naoyuki, Utsumi, Makoto, Ryo, Mina, Gotoh, Masahide, Nakamata, Shinichi, Sakai, Takao, Sakai, Yoshiyuki, Miyajima, Masaaki, Kumura, Hiroshi, Fukuda, Kenji, Okumura, Hajime

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Low Cost Ion Implantation Process with High Heat Resistant Photoresist in Silicon Carbide Device Fabrication von Otsuki, Akihiro, Miyajima, Masaaki, Okumura, Hajime, Furukawa, Yukihiro, Imai, Tomohiro, Fukuda, Kenji, Oose, Naoyuki, Utsumi, Makoto, Gotoh, Masahide, Sakai, Yoshiyuki, Fujiwara, Takenori, Tanigaki, Yugo, Ryo, Mina, Nakamata, Shinichi, Sakai, Takao, Tonari, Kazuhiro, Kumura, Hiroshi

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Improvement of Drain-Source Current Leakage by Formation of a High Temperature Ion Implantation Mask of SiC Trench MOSFET Device without Dry Etching Process von Kawamoto, Kazunari, Kobayashi, Yusuke, Fujiwara, Takenori, Okazawa, Toru, Hayasaka, Makoto, Oose, Naoyuki, Harada, Shinsuke, Okumura, Hajime

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Fabrication and Performance of 16-kV Ultrahigh-Voltage SiC Power Devices von Yonezawa, Yoshiyuki, Mizushima, Tomonori, Takenaka, Kensuke, Fujisawa, Hiroyuki, Kato, Tomohisa, Okamoto, Dai, Sometani, Mitsuru, Deguchi, Tadayoshi, Harada, Shinsuke, Tanaka, Yasunori, Matsunaga, Shinichiro, Hatakeyama, Tetsuo, Okamoto, Mitsuo, Yoshikawa, Mitsuru, Oose, Naoyuki, Ryo, Mina, Kimura, Hiroshi, Miyajima, Masaaki, Kumagai, Naoki, Takei, Manabu, Arai, Manabu, Takao, Kazuto, Izumi, Toru, Hayashi, Toshihiko, Nakayama, Koji, Asano, Katsunori, Otsuki, Akihiro, Fukuda, Kenji, Okumura, Hajime, Kimoto, Tsunenobu

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非ドライエッチングプロセスのＳｉＣトレンチＭＯＳＦＥＴデバイス用高温イオン注入マスク形成によるドレイン電流リークの改善 von 川本, 一成, 小林, 勇介, 藤原, 健典, 岡沢, 徹, 早坂, 惇, 大瀬, 直之, 原田, 信介, 奥村, 元

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Silicon carbide semiconductor device and method for manufacturing silicon carbide semiconductor device von HARADA SHINSUKE, OOSE NAOYUKI, OKAMOTO MITSUO, NAKAJIMA TSUNEHIRO, FUKUDA KENJI, IMAI FUMIKAZU

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SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE von HARADA, SHINSUKE, OKAMOTO, MITSUO, NAKAJIMA, TSUNEHIRO, IMAI, FUMIKAZU, FUKUDA, KENJI, OOSE, NAOYUKI

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SEALED BATTERY von Tsurudome, Naoyuki, Okimoto, Ryota, Haraguchi, Shin, Okutani, Oose, Hasegawa, Takasumi

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SEALED BATTERY von HASEGAWA Takasumi, OKIMOTO Ryota, OKUTANI Oose, TSURUDOME Naoyuki, HARAGUCHI Shin

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SEALED BATTERY von HASEGAWA Takasumi, OKIMOTO Ryota, OKUTANI Oose, TSURUDOME Naoyuki, HARAGUCHI Shin

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