Micromechanical high-doses radiation sensor with bossed membrane and interferometry optical detection von Augustyniak, I., Knapkiewicz, P., Sareło, K., Dziuban, J.A., Debourg, E., Pons, P., Olszacki, M.

Volltext

Experimental verification of temperature coefficients of resistance for uniformly doped P-type resistors in SOI von Olszacki, M, Maj, C, Al Bahri, M, Marrot, J-C, Boukabache, A, Pons, P, Napieralski, A

Volltext

Micromechanical High-doses Radiation Sensor with Bossed Membrane and Interferometry Optical Read-out von Augustyniak, I., Knapkiewicz, P., Sareło, K., Dziuban, J., Debourg, E., Pons, P., Olszacki, M.

Volltext

Parasitic phenomena in electrostatic actuators based on sealed cavity fabricated with wafer-bonding technology von Maj, C., Olszacki, M., Al Bahri, M., Pons, P., Scheid, E., Napieralski, A.

Volltext

The effect of parasitic boron doping on P-type piezoresistors von Olszacki, M., Maj, C., Al Bahri, M., Pons, P., Marrot, J-C., Napieralski, A.

Volltext

A multi-domain piezoresistive pressure sensor design tool based on analytical models von Olszacki, M., Maj, C., Al Bahri, M., Peyrou, D., Kerrour, F., Pons, P., Napieralski, A.

Volltext bestellen

Analytical model of electrostatic membrane-Based actuators von Maj, C., Olszacki, M., Al Bahri, M., Pons, P., Napieralski, A.

Volltext bestellen