TetraMax Diagnosis and Laker Software on Failure Analysis For ATPG/Scan Failures von Ang Ghim Boon, Chan Choon Kit, Chua Kok Keng, Oh Chong Khiam

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Failure analysis approach For TrenchMOS devices von Oh Chong Khiam, Yao Yujin, Gao, Anna, Li Yan, Loh Sock Khim, Lim Seng Keat, King Mingchu

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Phase and microstructure analysis by electron diffraction in semiconductor failure analysis von Binghai Liu, Zhiqiang Mo, Qiang Lei, Soo Sien Seah, Chen Ye, Lee Gek Li, Chen Changqing, Chong Khiam Oh

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A SEM Based Technique To Detect Pin-holes In As-Deposited/As-Grown Dielectrics von Kamat, N.R., Oh Chong Khiam, Zhao Si Ping

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A Study of Sulphur Assisted Corrosion in Technologies with Copper Interconnects von Kamat, N.R., Lal, M., Khiam, O.C., Kun, L.

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Electrochemical wet etching in KOH:H20 solution and secondary/ion image passive voltage contrast as a complementary technique in failure analysis von Oh Chong Khiam, Bi Jian Hua, Redkar, Shailesh

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A new fluorescent and Photoemission Microscope for submicron VLSI IC failure analysis von Oh Chong Khiam, Wu Zong Min, Redkar, S., Cheong, C., Yang, T.

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Step like degradation profile of electromigration of W-plug contact von Guo Qiang, Lo Keng Foo, Zeng Xu, Neo Soh Ping, Yao Pei, Oh Chong Khiam

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Copper corrosion issue and analysis on copper damascene process von Zhigang Song, Soh Ping Neo, Chong Khiam Oh, Redkar, S., Yuan-Ping Lee

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Padless structure design for easy identification of bridging defects in lines by passive voltage contrast von Song, Zhigang, Redkar, Shailesh, Oh, Chong Khiam

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A study of defects causing yield loss in copper backend process due to the power shorts von Kamat, N.R., Lal, M., Oh Chong Khiam

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Application of Auger electron spectroscopy (AES), TEM electron energy loss spectrum (EELS) in failure analysis on poly grooves issue in wafer fabrication von Phong Ooi Lin, Ang Ghim Boon, Chua Kok Keng, Oh Chong Khiam, Lo Keng Foo

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Padless structure design for easy identification of bridging defects in lines by passive voltage contrast von OH CHONG KHIAM, REDKAR SHAILESH, SONG ZHIGANG

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Padless structure design for easy identification of bridging defects in lines by passive voltage contrast von OH CHONG KHIAM, REDKAR SHAILESH, SONG ZHIGANG

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A novel fluorescent and photoemission apparatus and method for submicron ic failure analysis von SIN CHEONG LIP, KHIAM OH CHONG, MIN WU ZONG, REDKAR SHAILESH

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