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    Toxicological investigations in the semiconductor industry: II. Studies on the subacute inhalation toxicity and genotoxicity of gaseous waste products from the aluminum plasma etching process

    Toxicological investigations in the semiconductor industry: II. Studies on the subacute inhalation toxicity and genotoxicity of gaseous waste products from the aluminum plasma etch... von Bauer, S, Werner, N, Wolff, I, Damme, B, Oemus, K, Hoffmann, P


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    Toxicological Investigations in the Semiconductor Industry: I. Studies on the Acute Oral Toxicity of a Complex Mixture of Waste Products from the Aluminium Plasma Etching Process

    Toxicological Investigations in the Semiconductor Industry: I. Studies on the Acute Oral Toxicity of a Complex Mixture of Waste Products from the Aluminium Plasma Etching Process von Bauer, Siegfried, Wolff, Ilona, Werner, Nadeshda, Hoffmann, Peter, Herzschuh, R., Oemus, Kerstin, Rath, Friedrich Wilhelm, Voigt, Reiner


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