Comparison of Langmuir probe and multipole resonance probe measurements in argon, hydrogen, nitrogen, and oxygen mixtures in a double ICP discharge von Fiebrandt, Marcel, Oberberg, Moritz, Awakowicz, Peter

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The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes von Pohle, Dennis, Schulz, Christian, Oberberg, Moritz, Awakowicz, Peter, Rolfes, Ilona

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Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode von Eremin, Denis, Engel, Dennis, Krüger, Dennis, Wilczek, Sebastian, Berger, Birk, Oberberg, Moritz, Wölfel, Christian, Smolyakov, Andrei, Lunze, Jan, Awakowicz, Peter, Schulze, Julian, Brinkmann, Ralf Peter

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Diagnostics of Plasma Processes Based on Parallelized Spatially Resolved In-Situ Reflection Measurements von Schulz, Christian, Runkel, Jan, Oberberg, Moritz, Awakowicz, Peter, Rolfes, Ilona

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On the Multipole Resonance Probe: Current Status of Research and Development von Oberrath, Jens, Friedrichs, Michael, Gong, Junbo, Oberberg, Moritz, Pohle, Dennis, Schulz, Christian, Wang, Chunjie, Awakowicz, Peter, Brinkmann, Ralf Peter, Lapke, Martin, Mussenbrock, Thomas, Musch, Thomas, Rolfes, Ilona

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Control-oriented plasma modeling and controller design for reactive sputtering von Woelfel, Christian, Oberberg, Moritz, Berger, Birk, Engel, Dennis, Brinkmann, Ralf Peter, Schulze, Julian, Awakowicz, Peter, Lunze, Jan

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Improved Morphology and Performance of Solution‐Processed Metal‐Oxide Thin‐Film Transistors Due to a Polymer Based Interface Modifier von Weber, Corinna, Oberberg, Moritz, Weber, Dennis, Bock, Claudia, Pham, Duy Vu, Kunze, Ulrich

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Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD von Kirchheim, Dennis, Wilski, Stefan, Jaritz, Montgomery, Mitschker, Felix, Oberberg, Moritz, Trieschmann, Jan, Banko, Lars, Brochhagen, Markus, Schreckenberg, Rabea, Hopmann, Christian, Böke, Marc, Benedikt, Jan, de los Arcos, Teresa, Grundmeier, Guido, Grochla, Dario, Ludwig, Alfred, Mussenbrock, Thomas, Brinkmann, Ralf Peter, Awakowicz, Peter, Dahlmann, Rainer

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Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results von Berger, Birk, Eremin, Denis, Oberberg, Moritz, Engel, Dennis, Wölfel, Christian, Zhang, Quan-Zhi, Awakowicz, Peter, Lunze, Jan, Brinkmann, Ralf Peter, Schulze, Julian

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Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the {\mu}-mode von Eremin, Denis, Engel, Dennis, Krüger, Dennis, Wilczek, Sebastian, Berger, Birk, Oberberg, Moritz, Wölfel, Christian, Smolyakov, Andrei, Lunze, Jan, Awakowicz, Peter, Schulze, Julian, Brinkmann, Ralf Peter

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Process diagnostics in PIAD: tracing plasma fluctuations and drifts von Malobabic, Sina, Harhausen, Jens, Oberberg, Moritz, Foest, Rüdiger, Mechold, Lars, Awakowicz, Peter, Brinkmann, Ralf Peter

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