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  1. 1
    Nitridation of niobium films by rapid thermal processing: different behaviour of films on oxydized silicon and monocrystalline sapphire substrates

    Nitridation of niobium films by rapid thermal processing: different behaviour of films on oxydized silicon and monocrystalline sapphire substrates von Brunkahl, Oliver, Mertens, Regine, Bock, Wolfgang, Thoma, Klaus, Kolbesen, Bernd Ottmar

    Veröffentlicht in Mikrochimica acta (1966)

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  2. 2
    Nitridation of niobium films by rapid thermal processing : different behaviour of films on oxydized silicon and monocrystalline sapphire substrates

    Nitridation of niobium films by rapid thermal processing : different behaviour of films on oxydized silicon and monocrystalline sapphire substrates von BRUNKAHL, Oliver, MERTENS, Regine, BOCK, Wolfgang, THOMA, Klaus, OTTMAR KOLBESEN, Bernd


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