Numerical simulations based on probe measurements in EUV-induced hydrogen plasma von Abrikosov, Alex, Reshetnyak, Viktor, Astakhov, Dmitry, Dolgov, Alexandr, Yakushev, Oleg, Lopaev, Dmitry, Krivtsun, Vladimir

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X-Ray and VUV Spectra from the Laser Plasma Produced with “Kanal-2” Facility von Kologrivov, Andrey Aleksandrovich, Osipov, Mikhail Vladimirovich, Puzyrev, Victor Nikolaevich, Starodub, Alexandr Nikolaevich, Yakushev, Oleg Feliksovich

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Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection von Abramenko, D.B., Antsiferov, P.S., Astakhov, D.I., Vinokhodov, Aleksandr Yu, Vichev, Il'ya Yu, Gayazov, R.R., Grushin, Aleksandr S., Dorokhin, L.A., Ivanov, Vladimir V., Kim, Dmitrii A., Koshelev, Konstantin N., Krainov, Pavel V., Krivokorytov, Mikhail S., Krivtsun, Vladimir M., Lakatosh, B.V., Lash, Aleksandr A., Medvedev, Vyacheslav V., Ryabtsev, Aleksandr N., Sidel'nikov, Yu.V., Snegirev, E.P., Solomyannaya, Anna D., Spiridonov, Maksim V., Tsygvintsev, Il'ya P., Yakushev, Oleg F., Yakushkin, A.A.

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SHORT- WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE von GLUSHKOV, Denis Aleksandrovich, SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich

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HIGH BRIGHTNESS LPP EUV LIGHT SOURCE WITH FAST ROTATING TARGET AND METHOD OF COOLING THEREOF von SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, GLUSHKOV, Denis Alexandrovich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich, ELLWI, Samir

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X-ray source with rotating liquid-metal target von Khristoforov, Oleg Borisovich, Koshelev, Konstantin Nikolaevich, Ellwi, Samir, Vinokhodov, Aleksandr Yurievich, Ivanov, Vladimir Vitalievich, Medvedev, Vyacheslav Valerievich, Sidelnikov, Yury Viktorovich, Glushkov, Denis Alexandrovich, Krivtsun, Vladimir Mikhailovich, Yakushev, Oleg Feliksovich, Krivokorytov, Mikhail Sergeyevich, Lash, Aleksandr Andreevich

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X-RAY SOURCE WITH ROTATING LIQUID-METAL TARGET von SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, GLUSHKOV, Denis Alexandrovich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich, ELLWI, Samir

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SHORT- WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE von GLUSHKOV, Denis Aleksandrovich, SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich

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Compact wideband VUV spectrometer von Abramenko, Dmitriy Borisovich, Shevelko, Aleksander Petrovich, Krivtsun, Vladimir Mikhailovich, Yakushev, Oleg Feliksovich

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X-RAY SOURCE WITH ROTATING LIQUID-METAL TARGET von SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, GLUSHKOV, Denis Alexandrovich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich, ELLWI, Samir

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COMPACT WIDEBAND VUV SPECTROMETER von SHEVELKO, Aleksander Petrovich, YAKUSHEV, Oleg Feliksovich, ABRAMENKO, Dmitriy Borisovich, KRIVTSUN, Vladimir Mikhailovich

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X-RAY SOURCE WITH ROTATING LIQUID-METAL TARGET von SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, GLUSHKOV, Denis Alexandrovich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich, ELLWI, Samir

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SHORT- WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE von GLUSHKOV, Denis Aleksandrovich, SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich

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HIGH BRIGHTNESS LASER-PRODUCED PLASMA LIGHT SOURCE von SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, GLUSHKOV, Denis Alexandrovich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich, ELLWI, Samir

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X-ray source with rotating liquid-metal target and method of generating radiation von SIDELNIKOV Yury Viktorovich, LASH Aleksandr Andreevich, KRIVTSUN Vladimir Mikhailovich, ELLWI Samir, YAKUSHEV Oleg Feliksovich, VINOKHODOV Aleksandr Yurievich, IVANOV Vladimir Vitalievich, KOSHELEV Konstantin Nikolaevich, MEDVEDEV Vyacheslav Valerievich, GLUSHKOV Denis Alexandrovich, KRIVOKORYTOV Mikhail Sergeyevich, KHRISTOFOROV Oleg Borisovich

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X-RAY SOURCE WITH ROTATING LIQUID-METAL TARGET von SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, GLUSHKOV, Denis Alexandrovich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich, ELLWI, Samir

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X-ray source with rotating liquid-metal target and method of generating radiation von SIDELNIKOV Yury Viktorovich, LASH Aleksandr Andreevich, KRIVTSUN Vladimir Mikhailovich, ELLWI Samir, YAKUSHEV Oleg Feliksovich, VINOKHODOV Aleksandr Yurievich, IVANOV Vladimir Vitalievich, KOSHELEV Konstantin Nikolaevich, MEDVEDEV Vyacheslav Valerievich, GLUSHKOV Denis Alexandrovich, KRIVOKORYTOV Mikhail Sergeyevich, KHRISTOFOROV Oleg Borisovich

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HIGH-BRIGHTNESS LPP SOURCE AND METHODS FOR GENERATING RADIATION AND MITIGATING DEBRIS von SIDELNIKOV, Yury Viktorovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRYVOKORYTOV, Mikhail Sergeyevich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich

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HIGH-BRIGHTNESS LPP SOURCE AND METHODS FOR GENERATING RADIATION AND MITIGATING DEBRIS von SIDELNIKOV, Yury Viktorovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRYVOKORYTOV, Mikhail Sergeyevich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich

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SHORT-WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE AND METHOD OF COLLECTING RADIATION von GLUSHKOV, Denis Aleksandrovich, SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, IVANOV, Vladimir Vitalievich, VINOKHODOV, Aleksandr Yurievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich, ELLWI, Samir

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