Monolithic single PMUT-on-CMOS ultrasound system with +17 dB SNR for Imaging Applications von Zamora, I., Ledesma, E., Uranga, A., Barniol, N.

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Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection von Torres, Francesc, Uranga, Arantxa, Barniol, Núria

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Miniaturized 0.13-μm CMOS Front-End Analog for AlN PMUT Arrays von Zamora, Iván, Ledesma, Eyglis, Uranga, Arantxa, Barniol, Núria

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Fully Integrated Pitch-Matched AlScN PMUT-on-CMOS Array for High- Resolution Ultrasound Images von Ledesma, Eyglis, Uranga, Arantxa, Torres, Francesc, Barniol, Nuria

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A Single-Chip AlScN PMUTs-on-CMOS Hydrophone von Ledesma, Eyglis, Uranga, Arantxa, Barniol, Nuria

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Enhancing AlN PMUTs' Acoustic Responsivity within a MEMS-on-CMOS Process von Ledesma, Eyglis, Zamora, Ivan, Uranga, Arantxa, Torres, Francesc, Barniol, Núria

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Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth von Ledesma, Eyglis, Zamora, Iván, Uranga, Arantxa, Barniol, Núria

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Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution von Vidal-Álvarez, Gabriel, Agustí, Jordi, Torres, Francesc, Abadal, Gabriel, Barniol, Núria, Llobet, Jordi, Sansa, Marc, Fernández-Regúlez, Marta, Pérez-Murano, Francesc, San Paulo, Álvaro, Gottlieb, Oded

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High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation von Zamora, Iván, Ledesma, Eyglis, Uranga, Arantxa, Barniol, Núria

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Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator von Tzanov, Vassil, Llobet, Jordi, Torres, Francesc, Perez-Murano, Francesc, Barniol, Nuria

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Mechanical relays for digital circuits von Barniol, Núria

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CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology von Muñoz-Gamarra, Jose Luis, Uranga, Arantxa, Barniol, Nuria

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Fluid compressional properties sensing at microscale using a longitudinal bulk acoustic wave transducer operated in a pulse-echo scheme von Yanez, Jesus, Uranga, Arantxa, Barniol, Nuria

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Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties von Ledesma, Eyglis, Zamora, Iván, Yanez, Jesús, Uranga, Arantxa, Barniol, Núria

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Design and characterization of a monolithic CMOS-MEMS mutually injection-locked oscillator for differential resonant sensing von Prache, Pierre, Juillard, Jérôme, Ferreira, Pietro Maris, Barniol, Núria, Riverola, Marti

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Tent-Plate AlN PMUT With a Piston-Like Shape Under Liquid Operation von Ledesma, Eyglis, Zamora, Ivan, Uranga, Arantxa, Barniol, Nuria

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Nanomechanical Mass Sensor for Spatially Resolved Ultrasensitive Monitoring of Deposition Rates in Stencil Lithography von Arcamone, Julien, Sansa, Marc, Verd, Jaume, Uranga, Arantxa, Abadal, Gabriel, Barniol, Núria, van den Boogaart, Marc, Brugger, Juergen, Pérez-Murano, Francesc

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Suppression of the A-f-mediated noise at the top bifurcation point in a MEMS resonator with both hardening and softening hysteretic cycles von Sobreviela, Guillermo, Vidal-Álvarez, Gabriel, Riverola, Martín, Uranga, Arantxa, Torres, Francesc, Barniol, Núria

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Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors von Torres, Francesc, Uranga, Arantxa, Riverola, Martí, Sobreviela, Guillermo, Barniol, Núria

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System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection von Villarroya, María, Verd, Jaume, Teva, Jordi, Abadal, Gabriel, Forsen, Esko, Murano, Francesc Pérez, Uranga, Arantxa, Figueras, Eduard, Montserrat, Josep, Esteve, Jaume, Boisen, Anja, Barniol, Núria

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