Diffusion of iron and gold in silicon annealed with millisecond pulses von Antonova, I. V., Kadyrakunov, K. B., Nidaev, E. V., Smirnov, L. S.

Volltext

Influence of the Surface on the Stability of Radiation Defects Introduced by Electron Irradiation von Nidaev, E. V., Popov, A. I.

Volltext

Laser annealing of radiation defects in low disordered layers von Kachurin, G. A., Nidaev, E. V.

Volltext

Decomposition of supersaturated antimony solutions in silicon created by pulsed annealing of ion-doped layers von Kadyrakunov, K. B., Nidaev, E. V., Tyshchenko, I. E., Smirnov, L. S.

Volltext

Behaviour of a built-in charge in a dielectric at pulsed annealing of SiSiO2, structures von Kadyrakunov, K. B., Nidaev, E. V., Smirnov, L. S.

Volltext

Flash lamp annealing of arsenic implanted silicon von Klabes, R., Matthäi, J., Voelskow, M., Kachurin, G. A., Nidaev, E. V., Bartsch, H.

Volltext

Dopant redistribution after flash lamp annealing von Klabes, R., Voelskow, M., Woittennek, H., Nidaev, E. V., Smirnov, L. S.

Volltext

Flash lamp annealing of ion-implanted polycrystalline silicon von Kadyrakunov, K. B., Nidaev, E. V., Plotnikov, A. E., Smirnov, L. S., Melnik, I. G., Makeev, M. V.

Volltext

Influence of the Surface on the Stability of Radiation Defects Introduced by Electron Irradiation von Nidaev, E. V., Popov, A. I.

Volltext

Behaviour of a built-in charge in a dielectric at pulsed annealing of SiSiO2, structures von Kadyrakunov, K. B., Nidaev, E. V., Smirnov, L. S.

Volltext

Diffusion of iron and gold in silicon annealed with millisecond pulses von Antonova, I. V., Kadyrakunov, K. B., Nidaev, E. V., Smirnov, L. S.

Volltext

Decomposition of supersaturated antimony solutions in silicon created by pulsed annealing of ion-doped layers von Kadyrakunov, K. B., Nidaev, E. V., Tyshchenko, I. E., Smirnov, L. S.

Volltext

Flash lamp annealing of arsenic implanted silicon von Klabes, R., Matthäi, J., Voelskow, M., Kachurin, G. A., Nidaev, E. V., Bartsch, H.

Volltext

Flash lamp annealing of ion-implanted polycrystalline silicon von Kadyrakunov, K. B., Nidaev, E. V., Plotnikov, A. E., Smirnov, L. S., Melnik, I. G., Makeev, M. V.

Volltext