Development of Direct Deep Reactive Ion Etching Process Using Laser Interference Lithographed Etch Barrier without Intermediate Layer von Je, Soonkyu, Shim, Jongmyeong, Kim, Joongeok, Kim, Minsoo, Lee, Jinhyung, Nho, Heejin, Han, Jungjin, Kim, Seok-min, Kang, Shinill

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