AlGaN-based deep UV LEDs grown on sputtered and high temperature annealed AlN/sapphire von Susilo, Norman, Hagedorn, Sylvia, Jaeger, Dominik, Miyake, Hideto, Zeimer, Ute, Reich, Christoph, Neuschulz, Bettina, Sulmoni, Luca, Guttmann, Martin, Mehnke, Frank, Kuhn, Christian, Wernicke, Tim, Weyers, Markus, Kneissl, Michael

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