A 70-dB SNR High-Speed Global Shutter CMOS Image Sensor for in Situ Fluid Concentration Distribution Measurements von Oikawa, Tetsu, Kuroda, Rihito, Takahashi, Keigo, Shiba, Yoshinobu, Fujihara, Yasuyuki, Shike, Hiroya, Murata, Maasa, Kuo, Chia-Chi, Silva, Yhang Ricardo Sipauba Carvalho da, Goto, Tetsuya, Suwa, Tomoyuki, Morimoto, Tatsuo, Shirai, Yasuyuki, Inada, Takafumi, Sakai, Yushi, Nagase, Masaaki, Ikeda, Nobukazu, Sugawa, Shigetoshi

Volltext

A High Sensitivity and Compact Real Time Gas Concentration Sensor for Semiconductor and Electronic Device Manufacturing Process von Ishii, Hidekazu, Nagase, Masaaki, Ikeda, Nobukazu, Shiba, Yoshinobu, Shirai, Yasuyuki, Kuroda, Rihito, Sugawa, Shigetoshi

Volltext

Precise and high-speed control of partial pressures of multiple gas species in plasma process chamber using pulse-controlled gas injection von Morishita, Sadaharu, Goto, Tetsuya, Nagase, Masaaki, Ohmi, Tadahiro

Volltext

Measuring Temporal Variation of Concentration of ALD Precursor TEMAZ in Process Chamber Using UV Absorption Method von Inada, Takafumi, Goto, Tetsuya, Suwa, Tomoyuki, Nagase, Masaaki, Ishii, Hidekazu, Shiba, Yoshinobu, Sakai, Yushi, Sutoh, Akihito, Morimoto, Tatsuo, Shirai, Yasuyuki, Kuroda, Rihito, Sugawa, Shigetoshi

Volltext

A high-sensitivity compact gas concentration sensor using ultraviolet light absorption with a heating function for a high-precision trimethyl aluminum gas supply system von Ishii, Hidekazu, Nagase, Masaaki, Ikeda, Nobukazu, Shiba, Yoshinobu, Shirai, Yasuyuki, Kuroda, Rihito, Sugawa, Shigetoshi

Volltext

Precise Control of Gas Concentration Ratio in Process Chamber von Nagase, Masaaki, Kitano, Masafumi, Shirai, Yasuyuki, Ohmi, Tadahiro

Volltext

CHEMICAL ATTRIBUTES OF A YELLOW LATOSOL UNDER AGROFORESTRY SYSTEMS WITH ORGANIC ORANGES IN THE MUNICIPALITY OF CAPITÃO POÇO, PARÁ von Galvão, Jessivaldo Rodrigues, Santos, Odete Kariny Souza, Maia, Bruno Kleidson da Silva, Filho, Pedro Paulo da Costa Alves, Sales, Erika Cristina Gomes, Neves, Leonardo Braga, Nagase, Arthur Masaaki Maeda

Volltext

Thruster control device and thruster control method von Okumura, Yukihiro, Nagase, Masaaki

Volltext bestellen

Fluid sealing device and pressure detector calibration device von Nagase, Masaaki, Takimoto, Masahiko

Volltext bestellen

New Metal Organic Gas Supply System by Using an Advanced Flow Control System von Yamaji, Michio, Yamashita, Satoru, Hidaka, Atsushi, Nagase, Masaaki, Ikeda, Nobukazu, Sugawa, Shigetoshi, Ohmi, Tadahiro

Volltext

Diaphragm Durability Enhancement for Valves Supplying Gas for Atomic Layer Deposition von Yamaji, Michio, Tanikawa, Tsuyoshi, Yakushijin, Tadayuki, Funakoshi, Takashi, Yamashita, Satoru, Hidaka, Atsushi, Nagase, Masaaki, Ikeda, Nobukazu, Sugawa, Shigetoshi, Ohmi, Tadahiro

Volltext

Chemical Attributes of a Yellow Latosol Under Agroforestry Systems With Organic Oranges in the Municipality of Capitão Poço, Pará von Galvao, Jessivaldo Rodrigues, Santos, Odete Kariny Souza, Maia, Bruno Kleidson da Silva, Alves Filho, Pedro Paulo da Costa, Sales, Erika Cristina Gomes, Neves, Leonardo Braga, Nagase, Arthur Masaaki Maeda

Volltext

Response of a Fiber-Optic Sensor with a Chitosan/Poly(vinyl alcohol) Cladding to Organic Solvents in Water von KURAUCHI, Yoshiaki, NAGASE, Masaaki, EGASHIRA, Naoyoshi, OHGA, Kazuya

Volltext

FLUID SEALING DEVICE AND PRESSURE DETECTOR CALIBRATION DEVICE von TAKIMOTO, Masahiko, NAGASE, Masaaki

Volltext bestellen

Density measurement device von Nagase, Masaaki, Tanaka, Kazuteru, Ikeda, Nobukazu, Takimoto, Masahiko, Nishino, Kouji

Volltext bestellen

Concentration measuring method, and concentration measuring device von Deguchi, Yoshihiro, Nagase, Masaaki, Ikeda, Nobukazu, Nishino, Kouji

Volltext bestellen

DENSITY MEASUREMENT DEVICE von SUGIMOTO, Kosuke, NAGASE, Masaaki, ISHII, Hidekazu, FUKAWA, Takashi, ASHINO, Wataru

Volltext bestellen

THRUSTER CONTROL DEVICE AND THRUSTER CONTROL METHOD von OKUMURA, Yukihiro, NAGASE, Masaaki

Volltext bestellen

Abnormality detection method for flow rate control device, and flow rate monitoring method von Hidaka, Atsushi, Hirata, Kaoru, Nagase, Masaaki, Ikeda, Nobukazu, Nishino, Kouji

Volltext bestellen

Measuring Temporal Variation of Concentration of ALD Precursor TEMAZ in Process Chamber Using UV Absorption Method von Inada, Takafumi, Goto, Tetsuya, Suwa, Tomoyuki, Nagase, Masaaki, Ishii, Hidekazu, Shiba, Yoshinobu, Sakai, Yushi, Sutoh, Akihito, Morimoto, Tatsuo, Shirai, Yasuyuki, Kuroda, Rihito, Sugawa, Shigetoshi

Volltext