Single-wafer integrated semiconductor device processing von Moslehi, M.M., Chapman, R.A., Wong, M., Paranjpe, A., Najm, H.N., Kuehne, J., Yeakley, R.L., Davis, C.J.

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Process uniformity and slip dislocation patterns in linearly ramped-temperature transient rapid thermal processing of silicon von Moslehi, M.M.

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Thermal Nitridation of Si and SiO/sub 2/ for VLSI von Moslehi, M.M., Saraswat, K.C.

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Thermal nitridation of Si and SiO 2 for VLSI von Moslehi, M.M., Saraswat, K.C.

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Thermal nitridation of Si and SiO2for VLSI von Moslehi, M.M., Saraswat, K.C.

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Critical technology challenges in low power electronics von Singh, R., Sharangpani, R., Poole, K.F., Moslehi, M.M.

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Electrical characteristics and irradiation sensitivity of IGFETs with rapidly grown ultrathin gate dielectrics von Wright, P.J., Moslehi, M.M., Saraswat, K.C.

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Preoxidation treatment using HCl/HF vapor von Wong, M., Liu, D.K.Y., Moslehi, M.M., Reed, D.W.

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Interfacial and breakdown characteristics of MOS devices with rapidly grown ultrathin SiO 2 gate insulators von Moslehi, M.M., Shatas, S.C., Saraswat, K.C., Meindl, J.D.

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Interfacial and breakdown characteristics of MOS devices with rapidly grown ultrathin SiO2gate insulators von Moslehi, M.M., Shatas, S.C., Saraswat, K.C., Meindl, J.D.

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Rapid thermal multiprocessing for a programmable factory for adaptable manufacturing of ICs von Saraswat, K.C., Apte, P.P., Booth, L., Yunzhong Chen, Dankoski, P.C.P., Degertekin, F.L., Franklin, G.F., Khuri-Yakub, B.T., Moslehi, M.M., Schaper, C., Gyugyi, P.J., Lee, Y.J., Pei, J., Wood, S.C.

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Formation of MOS Gates by rapid thermal/microwave remote-plasma multiprocessing von Moslehi, M.M., Saraswat, K.C.

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IIIB-1 submicrometer IGFET fabrication by rapid thermal processing von Moslehi, M.M., Wright, P.J., Saraswat, K.C.

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Sensor fusion for ULSI manufacturing process control von Moslehi, M.M., Velo, L., Najm, H., Breedijk, T., Dostalik, B.

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The use of rapid thermal processing to improve performance of sub-half micron CMOS with and without salicide von Chapman, R.A., Rodder, M., Moslehi, M.M., Velo, L., Kuehne, J.W., Lane, A.P.

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Modeling the viscosity of ionic liquids using combined friction theory with perturbed hard-chain equation of state and neural network approaches von Moslehi, H., Hosseini, S.M., Pierantozzi, M., Alavianmehr, M.M., Haghighi, B.

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Density gradient theory study of surface tension of pure and mixture of refrigerant fluids with the help of perturbed-hard-chain equation of state von Moslehi, H., Hosseini, S.M., Alavianmehr, M.M.

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