SIMS/ARXPS-A New Technique of Retained Dopant Dose and Profile Measurement of Ultralow-Energy Doping Processes von Shu Qin, Kent Zhuang, Shifeng Lu, McTeer, A., Morinville, W., Noehring, K.

Volltext

Comparative study of native oxide impacts on low energy doping processes von Qin, Shu, McTeer, Allen, Zhuang, Kent, Morinville, Wendy, Lu, Shifeng

Volltext

Plasma doping two-dimensional characterization using low energy x-ray emission spectroscopy and full wafer secondary ion mass spectrometry/angle-resolved x-ray electron spectroscop... von Qin, Shu, Morinville, Wendy, Zhuang, Kent, Fabreguette, Francois, McTeer, Allen, Hu, Y. Jeff, Lu, Shifeng

Volltext

SIMS/ARXPS-A New Technique of Retained Dopant Dose and Profile Measurement of Low Energy Doping Processes von Qin, Shu, Zhuang, Kent, Lu, Shifeng, McTeer, Allen, Morinville, Wendy, Noehring, Kari

Volltext

Thermal processing impact on the integrity of HfO2-based high-k gate dielectrics von Xuefeng Lin, Morinville, W., Zhiyong Suo, Zhuang, K., Krasinski, C., Markowitz, D., Noehring, K., Yang Zhou, York, S., Yapa, H., Brown, J., Shifeng Lu

Volltext

Comparing rapid thermal process and low-temperature furnace annealed poly test wafers by SIMS and FTIR von Jingyan Zhang, Mathew, J., Canavan, M., Morinville, W.

Volltext bestellen

A survey of primary care patients' readiness to engage in the de-adoption practices recommended by Choosing Wisely Canada von Silverstein, William, Lass, Elliot, Born, Karen, Morinville, Anne, Levinson, Wendy, Tannenbaum, Cara

Volltext