Photoluminescence Spectra of thin Zno films grown by ALD technology von Akopyan, I. Kh, Davydov, V. Yu, Labzovskaya, M. E., Lisachenko, A. A., Mogunov, Ya. A., Nazarov, D. V., Novikov, B. V., Romanychev, A. I., Serov, A. Yu, Smirnov, A. N., Titov, V. V., Filosofov, N. G.

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