Serpentine spring design technique for high sensitivity MEMS capacitive accelerometer fabricated by gold multi-layer metal technology von Miyado, Kisuke, Tenneti, Devi Srujana, Onishi, Akira, Machida, Katsuyuki, Kurioka, Tomoyuki, Chang, Tso-Fu Mark, Sone, Masato, Miyake, Yoshihiro, Ito, Hiroyuki

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