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Material characteristics of electrically tunable zirconium oxide thin films
Veröffentlicht in Journal of applied physics
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Oblique-Directional Plasma Etching of Si Using a Faraday Cage
Veröffentlicht in Journal of the Electrochemical Society
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Redeposition of etch products on sidewalls during SiO2 etching in a fluorocarbon plasma. II. Effects of source power and bias voltage in a CF4 plasma
Veröffentlicht in Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
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