Low Voltage Nanoelectromechanical Switches Based on Silicon Carbide Nanowires von Feng, X. L, Matheny, M. H, Zorman, C. A, Mehregany, M, Roukes, M. L

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Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications von Chien-Hung Wu, Zorman, C.A., Mehregany, M.

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Electrothermal tuning of Al–SiC nanomechanical resonators von Jun, Seong Chan, Huang, X M H, Manolidis, M, Zorman, C A, Mehregany, M, Hone, J

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Silicon carbide MEMS for harsh environments von Mehregany, M., Zorman, C.A., Rajan, N., Chien Hung Wu

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Monocrystalline silicon carbide nanoelectromechanical systems von Yang, Y. T., Ekinci, K. L., Huang, X. M. H., Schiavone, L. M., Roukes, M. L., Zorman, C. A., Mehregany, M.

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VHF, UHF and microwave frequency nanomechanical resonators von Huang, X M H, Feng, X L, Zorman, C A, Mehregany, M, Roukes, M L

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Contact physics of gold microcontacts for MEMS switches von Hyman, D., Mehregany, M.

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Design and fabrication of a micromachined electrostatically suspended gyroscope von Damrongsak, B, Kraft, M, Rajgopal, S, Mehregany, M

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SiC cantilever resonators with electrothermal actuation von Jiang, Liudi, Cheung, R., Hedley, J., Hassan, M., Harris, A.J., Burdess, J.S., Mehregany, M., Zorman, C.A.

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Fabrication and characterization of polycrystalline SiC resonators von Roy, S., DeAnna, R.G., Zorman, C.A., Mehregany, M.

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Monocrystalline NbN nanofilms on a 3C-SiC∕Si substrate von Gao, J. R., Hajenius, M., Tichelaar, F. D., Klapwijk, T. M., Voronov, B., Grishin, E., Gol’tsman, G., Zorman, C. A., Mehregany, M.

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6H-SiC JFETs for 450 ^\hbox Differential Sensing Applications von Patil, A.C., Xiao-an Fu, Anupongongarch, C., Mehregany, M., Garverick, S.L.

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Mechanical properties of epitaxial 3C silicon carbide thin films von Jackson, K.M., Dunning, J., Zorman, C.A., Mehregany, M., Sharpe, W.N.

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High-aspect-ratio photolithography for MEMS applications von Miyajima, H., Mehregany, M.

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Fracture toughness of polycrystalline silicon carbide thin films von Bellante, J. J., Kahn, H., Ballarini, R., Zorman, C. A., Mehregany, M., Heuer, A. H.

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Fracture toughness of low-pressure chemical-vapor-deposited polycrystalline silicon carbide thin films von Hatty, V., Kahn, H., Trevino, J., Zorman, C. A., Mehregany, M., Ballarini, R., Heuer, A. H.

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Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines von Rajan, N., Mehregany, M., Zorman, C.A., Stefanescu, S., Kicher, T.P.

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Analysis of tip deflection and force of a bimetallic cantilever microactuator von Chu, Wen-Hwa, Mehregany, M, Mullen, R L

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Silicon carbide for microelectromechanical systems von Mehregany, M., Zorman, C.A., Roy, S., Fleischman, A.J., Rajan, N.

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Nanodevice motion at microwave frequencies von Henry Huang, Xue Ming, Zorman, Christian A., Mehregany, Mehran, Roukes, Michael L.

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