The role of cleaning conditions and epitaxial layer structure on reliability of Sc 2O 3 and MgO passivation on AlGaN/GaN HEMTS von Luo, B, Mehandru, R.M, Kim, Jihyun, Ren, F, Gila, B.P, Onstine, A.H, Abernathy, C.R, Pearton, S.J, Fitch, R.C, Gillespie, J, Dellmer, R, Jenkins, T, Sewell, J, Via, D, Crespo, A

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