High Deposition Rate Symmetric Magnet Pack for High Power Pulsed Magnetron Sputtering von Raman, Priya, Shchelkanov, Ivan, McLain, Jake, Cheng, Matthew, Ruzic, David, Haehnlein, Ian, Jurczyk, Brian, Stubbers, Robert, Armstrong, Sean

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High power pulsed magnetron sputtering: A method to increase deposition rate von Raman, Priya, Shchelkanov, Ivan A., McLain, Jake, Ruzic, David N

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Downstream plasma transport and metal ionization in a high-powered pulsed-plasma magnetron von Meng, Liang, Yu, He, Szott, Matthew M., McLain, Jake T., Ruzic, David N.

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Cu films prepared by bipolar pulsed high power impulse magnetron sputtering von Wu, Baohua, Haehnlein, Ian, Shchelkanov, Ivan, McLain, Jake, Patel, Dhruval, Uhlig, Jan, Jurczyk, Brian, Leng, Yongxiang, Ruzic, David N.

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Investigation and optimization of the magnetic field configuration in high-power impulse magnetron sputtering von Yu, He, Meng, Liang, Szott, Matthew M, McLain, Jake T, Cho, Tae S, Ruzic, David N

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Linear magnetron HiPIMS high deposition rate magnet pack von McLain, Jake, Raman, Priya, Patel, Dhruval, Spreadbury, Randall, Uhlig, Jan, Shchelkanov, Ivan, Ruzic, D.N.

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Direct measurement and modeling of the redirected ion flux in a high-powered pulsed-plasma magnetron von Meng, Liang, Yu, He, Sporre, John R., Raman, Priya, Szott, Matthew M., McLain, Jake T., Ruzic, David N.

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Enhanced detection limits for radiokrypton analysis von Zappala, Jake C., McLain, Derek, Mueller, Peter, Steeb, Jennifer L.

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