Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications von Mazzalai, Andrea, Balma, Davide, Chidambaram, Nachiappan, Matloub, Ramin, Muralt, Paul

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High Piezoelectric Longitudinal Coefficients in Sol-gel PZT Thin Film Multilayers von Balma, Davide, Mazzalai, Andrea, Chidambaram, Nachiappan, Sandu, Cosmin S., Neels, Antonia, Dommann, Alex, Hess, Peter, Binz, Dieter, Muralt, Paul

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High Quality Co-Sputtering AlScN Thin Films for Piezoelectric Lamb-Wave Resonators von Shao, Shuai, Luo, Zhifang, Lu, Yuan, Mazzalai, Andrea, Tosi, Carlo, Wu, Tao

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Al0.7Sc0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2·Qm) over 146 von Luo, Zhifang, Shao, Shuai, Liu, Kangfu, Lu, Yuan, Mazzalai, Andrea, Tosi, Carlo, Wu, Tao

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Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay Lines von Shao, Shuai, Luo, Zhifang, Lu, Yuan, Mazzalai, Andrea, Tosi, Carlo, Wu, Tao

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Low Loss Al 0.7 Sc 0.3 N Thin Film Acoustic Delay Lines von Shao, Shuai, Luo, Zhifang, Lu, Yuan, Mazzalai, Andrea, Tosi, Carlo, Wu, Tao

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Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes von Chidambaram, Nachiappan, Mazzalai, Andrea, Muralt, Paul

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Comparison of lead Zirconate Titanate thin films for microelectromechanical energy harvester with interdigitated and parallel plate electrodes von Chidambaram, N., Mazzalai, A., Balma, D., Muralt, P.

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Comparison of lead zirconate titanate (PZT) thin films for MEMS energy harvester with interdigitated and parallel plate electrodes von Chidambaram, N., Mazzalai, A., Muralt, P.

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PIEZOELECTRIC COATING AND DEPOSITION PROCESS von Röbisch, Volker, Mazzalai, Andrea, Heinz, Bernd

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PIEZOELECTRIC COATING AND DEPOSITION PROCESS von RÖBISCH, Volker, HEINZ, Bernd, MAZZALAI, Andrea

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PIEZOELECTRIC COATING AND DEPOSITION PROCESS von RÖBISCH, Volker, HEINZ, Bernd, MAZZALAI, Andrea

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압전 코팅 및 증착 공정 von HEINZ BERND, ROBISCH VOLKER, MAZZALAI ANDREA

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PIEZOELECTRIC COATING AND DEPOSITION PROCESS von HEINZ BERND, ROBISCH VOLKER, MAZZALAI ANDREA

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Piezoelectric coating and deposition process von HEINZ, BERND, MAZZALAI, ANDREA, ROEBISCH, VOLKER

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PZT thin films for MEMS devices:from in-situ sputter deposition to energy harvesting device von Mazzalai, Andrea

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Microgénérateur, en particulier pour montre-bracelet von Paul Muralt, Andrea Mazzalai, Jean-Claude Meylan

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Micro-générateur en particulier pour montre-bracelet von JEAN-CLAUDE MEYLAN, ANDREA MAZZALAI, PAUL MURALT

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Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications von Mazzalai, Andrea, Balma, Davide, Chidambaram, Nachiappan, Matloub, Ramin, Muralt, Paul

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Piezoelectric AlScN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors von Matloub Aghdam, Ramin, Hadad, Mahmoud, Mazzalai, Andrea, Chidambaram, Nachiappan, Moulard, Gilles, Sandu, Silviu Cosmin, Metzger, Thomas, Muralt, Paul

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