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Molecular-beam epitaxy growth of device-compatible GaAs on silicon substrates with thin (∼80nm) Si1−xGex step-graded buffer layers for high-κ III-V metal-oxide-semiconductor field...
Veröffentlicht in Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
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Molecular-beam epitaxy growth of device-compatible GaAs on silicon substrates with thin ( ∼ 80 nm ) Si 1 − x Ge x step-graded buffer layersfor high- κ III-V metal-oxide-semiconduct...
Veröffentlicht in Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
VolltextArtikel