A variable optical attenuator based on silicon micromechanics von Marxer, C., Griss, P., de Rooij, N.F.

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Micro-opto-mechanical 2×2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation von Marxer, C., de Rooij, N.F.

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Study of adsorption and viscoelastic properties of proteins with a quartz crystal microbalance by measuring the oscillation amplitude von Galli Marxer, C., Collaud Coen, M., Schlapbach, L.

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Laterally moving bistable MEMS DC switch for biomedical applications von Receveur, R.A.M., Marxer, C.R., Woering, R., Larik, V.C.M.H., de Rooij, N.-F.

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Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications von Marxer, C., Thio, C., Gretillat, M.-A., de Rooij, N.F., Battig, R., Anthamatten, O., Valk, B., Vogel, P.

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Miniaturized time-scanning Fourier transform spectrometer based on silicon technology von Manzardo, O, Herzig, H P, Marxer, C R, de Rooij, N F

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Applications of SOI-based optical MEMS von Noell, W., Clerc, P.-A., Dellmann, L., Guldimann, B., Herzig, H.-P., Manzardo, O., Marxer, C.R., Weible, K.J., Dandliker, R., de Rooij, N.

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Simultaneous measurement of the maximum oscillation amplitude and the transient decay time constant of the QCM reveals stiffness changes of the adlayer von Marxer, C Galli, Coen, M Collaud, Bissig, H, Greber, U F, Schlapbach, L

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MEMS compatible micro-GRIN lenses for fiber to chip coupling of light von Zickar, Michael, Noell, Wilfried, Marxer, Cornel, de Rooij, Nico

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Micro-opto-mechanical 2x2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation von Marxer, C, de Rooij, N F

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Reflective duplexer based on silicon micromechanics for fiber-optic communication von Marxer, C., Gretillat, M.-A., de Rooij, N.F., Battig, R., Anthamatten, O., Valk, B., Vogel, P.

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Advanced deep reactive ion etching: a versatile tool for microelectromechanical systems von Clerc, P-A, Dellmann, L, Grétillat, F, Grétillat, M-A, Indermühle, P-F, Jeanneret, S, Luginbuhl, Ph, Marxer, C, Pfeffer, T L, Racine, G-A, Roth, S, Staufer, U, Stebler, C, Thiébaud, P, Rooij, N F de

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Megahertz opto-mechanical modulator von Marxer, C., Grétillat, M.A., Jaecklin, V.P., Baettig, R., Anthamatten, O., Vogel, P., de Rooij, N.F.

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Reliability considerations for electrostatic polysilicon actuators using as an example the REMO component von Marxer, C., Gre´tillat, M.-A., de Rooij, N.F., Ba¨ttig, R., Anthamatten, O., Valk, B., Vogel, P.

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Quantitative analysis of supported membrane composition using the NanoSIMS von Kraft, M L, Fishel, S F, Marxer, C G, Weber, P K, Hutcheon, I D, Boxer, S G

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Wafer level hermetic package and device testing of a SOI-MEMS switch for biomedical applications von Receveur, Rogier A M, Zickar, Michael, Marxer, Cornel, Larik, Vincent, de Rooij, Nicolaas F

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Supported Membrane Composition Analysis by Secondary Ion Mass Spectrometry with High Lateral Resolution von Galli Marxer, Carine, Kraft, Mary L., Weber, Peter K., Hutcheon, Ian D., Boxer, Steven G.

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Cell spreading on quartz crystal microbalance elicits positive frequency shifts indicative of viscosity changes von Galli Marxer, Carine, Collaud Coen, Martine, Greber, Thomas, Greber, Urs F, Schlapbach, Louis

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Open Security Issues for Edge Named Function Environments von Krol, M, Marxer, C, Grewe, D, Psaras, I, Tschudin, C

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Comparison of MEMS variable optical attenuator designs von Marxer, C., de Jong, B., de Rooif, N.

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