Properties of hydrogenated amorphous carbon films deposited by PECVD and modified by SF6 plasma von Marins, N.M.S., Mota, R.P., Honda, R.Y., Nascente, P.A.P., Kayama, M.E., Kostov, K.G., Algatti, M.A., Cruz, N.C., Rangel, E.C.

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