Properties of extremely thin silicon layer in silicon-on-insulator structure formed by smart-cut technology von Popov, V.P, Antonova, I.V, Stas, V.F, Mironova, L.V, Gutakovskii, A.K, Spesivtsev, E.V, Mardegzhov, A.S, Franznusov, A.A, Feofanov, G.N

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