Synergistic effect of VUV photons and F atoms on damage and etching of porous organosilicate films von Lopaev, Dmitry V., Zyryanov, Sergey M., Zotovich, Alexey I., Rakhimova, Tatyana V., Mankelevich, Yury A., Rakhimov, Alexander T., Baklanov, Mikhail R.

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Photoabsorption and damage of OSG low‐k films by VUV emission at 140–160nm von Lopaev, Dmitry V, Rakhlinsky, Vladislav V, Zyryanov, Sergey M, Mankelevich, Yury A, Rakhimova, Tatyana V, Kurchikov, Konstantin A, Baklanov, Mikhail R

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Photoabsorption and damage of OSG low‐k films by VUV emission at 140–160 nm von Lopaev, Dmitry V., Rakhlinsky, Vladislav V., Zyryanov, Sergey M., Mankelevich, Yury A., Rakhimova, Tatyana V., Kurchikov, Konstantin A., Baklanov, Mikhail R.

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