Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures von Klaassen, Erno H., Petersen, Kurt, Noworolski, J.Mark, Logan, John, Maluf, Nadim I., Brown, Joe, Storment, Christopher, McCulley, Wendell, Kovacs, Gregory T.A.

Volltext

Miniature spectrometers for biochemical analysis von Yee, Gaylin M, Maluf, Nadim I, Hing, Paul A, Albin, Michael, Kovacs, Gregory T.A

Volltext

A high-performance planar piezoresistive accelerometer von Partridge, A., Reynolds, J.K., Chui, B.W., Chow, E.M., Fitzgerald, A.M., Zhang, L., Maluf, N.I., Kenny, T.W.

Volltext

Plasma-etched neural probes von Kewley, David T, Hills, Matthew D, Borkholder, David A, Opris, Ion E, Maluf, Nadim I, Storment, Christopher W, Bower, James M, Kovacs, Gregory T.A

Volltext

Packaging a piezoresistive pressure sensor to measure low absolute pressures over a wide sub-zero temperature range von Reynolds, J.Kurth, Catling, David, Blue, Randel C, Maluf, Nadim I, Kenny, Thomas

Volltext

Bulk micromachining of silicon von Kovacs, G.T.A., Maluf, N.I., Petersen, K.E.

Volltext

Characterizing deflectable microstructures via a high-resolution laser-based measurement system von Honer, Kenneth A., Maluf, Nadim I., Martinez, Edwardo, Kovacs, Gregory T.A.

Volltext

An in-line osmometer for application to a cell-based biosensor system von Mourlas, N.J., Gilchrist, K.H., Giovangrandi, L., Maluf, N.I., Kovacs, G.T.A.

Volltext

Process for in-plane and out-of-plane single-crystal-silicon thermal microactuators von Mark Noworolski, J., Klaassen, Erno H., Logan, John R., Petersen, Kurt E., Maluf, Nadim I.

Volltext

Flexible, dry-released process for aluminum electrostatic actuators von Storment, C.W., Borkholder, D.A., Westerlind, V., Suh, J.W., Maluf, N.I., Kovacs, G.T.A.

Volltext

An integrated controller for tunnel sensors von Partridge, A., Reynolds, J.K., Grade, J.D., Kane, B.J., Maluf, N.I., Kovacs, G.T.A., Kenny, T.W.

Volltext

Fabrication of SOI wafers with buried cavities using silicon fusion bonding and electrochemical etchback von Mark Noworolski, J., Klaassen, Erno, Logan, John, Petersen, Kurt, Maluf, Nadim I.

Volltext

High-voltage devices and circuits fabricated using foundry CMOS for use with electrostatic MEM actuators von Maluf, N.I., Reay, R.J., Kovacs, G.T.A.

Volltext

Discrete wavelength spectrometer von MALUF, NADIM I

Volltext bestellen

PROPORTIONALE, MIKROMECHANISCHE VORRICHTUNG von WILLIAMS, KIRT R, FULLER, EDWARD NELSON, MALUF, NADIM I, VAN DRIEENHUIZEN, BERT P, BARRON, RICHARD J

Volltext bestellen

Proportional micromechanical valve von MALUF NADIM I, WILLIAMS KIRT R, BARRON RICHARD J, VAN DRIEENHUIZEN BERT P, FULLER EDWARD NELSON

Volltext bestellen

Proportional micromechanical valve von Maluf, Nadim I, Williams, Kirt R, Van Drieenhuizen, Bert P, Fuller, Edward Nelson, Barron, Richard J

Volltext bestellen

PROPORTIONAL MICROMECHANICAL DEVICE von MALUF, NADIM, I, WILLIAMS, KIRT, R, BARRON, RICHARD, J, VAN DRIEENHUIZEN, BERT, P, FULLER, EDWARD, NELSON

Volltext bestellen

5 micron high acute cavity with channel by oxidizing fusion bonding of silicon substrates and stop etching von MALUF, NADIM, I, LOGAN, JOHN, R, VAN SPRAKELAAR, GERTJAN

Volltext bestellen

Miniature gauge pressure sensor using silicon fusion bonding and back etching von SPRAKELAAR GERTJAN VAN, LOGAN JOHN R, MALUF NADIM I

Volltext bestellen