Scribe Line Defect-Induced Yield Loss in FINFET Technology von Khatkhatay, Fauzia, Wang, Haiting, Gupta, Amit, Lee, Julie, Ali, Towshif, Kaule, Joseph Matthew, Popova, Ludmila, Huang, Chih-Chieh, Lee, Hye Jin, Zang, Yining, Ahn, Ki Cheol, Tsao, Chiahao, Lee, Tae Hoon, Mahalingam, Thirukumaran

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