High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation von Poodt, Paul, Lankhorst, Adriaan, Roozeboom, Fred, Spee, Karel, Maas, Diederik, Vermeer, Ad

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High-resolution direct-write patterning using focused ion beams von Ocola, Leonidas E., Rue, Chad, Maas, Diederik

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Nanopillar growth by focused helium ion-beam-induced deposition von Chen, Ping, Veldhoven, Emile van, Sanford, Colin A, Salemink, Huub W M, Maas, Diederik J, Smith, Daryl A, Rack, Philip D, Alkemade, Paul F A

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Chemical metrology on latent resist images von van Es, Maarten, Tamer, Selman, Bloem, Elin, Fillinger, Laurent, van Zeijl, Elfi, Maturová, Klára, van der Donck, Jacques, Willekers, Rob, Chuang, Adam, Maas, Diederik

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Model for nanopillar growth by focused helium ion-beam-induced deposition von Alkemade, Paul F. A., Chen, Ping, van Veldhoven, Emile, Maas, Diederik

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Imaging and Nanofabrication With the Helium Ion Microscope of the Van Leeuwenhoek Laboratory in Delft von Alkemade, Paul F. A., Koster, Emma M., van Veldhoven, Emile, Maas, Diederik J.

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Structural characterization of He ion microscope platinum deposition and sub-surface silicon damage von Drezner, Yariv, Greenzweig, Yuval, Fishman, Daniel, van Veldhoven, Emile, Maas, Diederik J., Raveh, Amir, Livengood, Richard H.

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Fast resist-activation dosimetry for extreme ultra-violet lithography von Heo, Jinseok, Xu, Man, Maas, Diederik

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Helium ion beam induced growth of hammerhead AFM probes von Nanda, Gaurav, van Veldhoven, Emile, Maas, Diederik, Sadeghian, Hamed, Alkemade, Paul F. A.

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Pulsed helium ion beam induced deposition: A means to high growth rates von Alkemade, Paul F. A., Miro, Hozanna, van Veldhoven, Emile, Maas, Diederik J., Smith, Daryl A., Rack, Philip D.

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Novel nanosample preparation with a helium ion microscope von Rudneva, Maria, van Veldhoven, Emile, Malladi, Sairam K., Maas, Diederik, Zandbergen, Henny W.

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Pulsed helium ion beam induced deposition: A means to high growth rates von Alkemade, Paul F. A., Miro, Hozanna, van Veldhoven, Emile, Maas, Diederik J., Smith, Daryl A., Rack, Philip D.

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Imaging and Nanofabrication With the Helium Ion Microscope of the V an L eeuwenhoek Laboratory in D elft von Alkemade, Paul F. A., Koster, Emma M., van Veldhoven, Emile, Maas, Diederik J.

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Lithographic patterning method von Sadeghian Marnani, Hamed, Maas, Diederik Jan, Van Veldhoven, Emile

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(Invited) Ultrafast Atomic Layer Deposition of Alumina Layers for Solar Cell Passivation von Poodt, Paul, Lankhorst, Adriaan, Roozeboom, Fred, Tiba, Veronica, Spee, Karel, Maas, Diederik, Vermeer, Ad

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Beam induced deposition of platinum using a helium ion microscope von Sanford, Colin A., Stern, Lewis, Barriss, Louise, Farkas, Lou, DiManna, Mark, Mello, Russ, Maas, Diederik J., Alkemade, Paul F. A.

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Sub-10-nm nanolithography with a scanning helium beam von Sidorkin, Vadim, van Veldhoven, Emile, van der Drift, Emile, Alkemade, Paul, Salemink, Huub, Maas, Diederik

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LITHOGRAPHIC PATTERNING METHOD von VAN VELDHOVEN, Emile, SADEGHIAN MARNANI, Hamed, MAAS, Diederik Jan

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LITHOGRAPHIC PATTERNING METHOD von VAN VELDHOVEN, Emile, SADEGHIAN MARNANI, Hamed, MAAS, Diederik Jan

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Metrology apparatus and metrology methods based on high harmonic generation from a diffractive structure von JOSEN Marinus, OP 'T ROOT Wilhelmus Patrick Elisabeth Maria, MAAS Diederik Jan, CRAMER Hugo Augustinus Joseph

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