Supercritical fluid processes for semiconductor device fabrication von Rothman, L.B., Robey, R.J., Ali, M.K., Mount, D.J.

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Adding energy to a cleaning process fluid for removing photo resist, residues and particles from semiconductor substrates, photo masks, reticles, disks and flat-panel displays von MOUNT DAVID J

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Adding energy to a cleaning process fluid for removing photo resist, residues and particles from semiconductor substrates, photo masks, reticles, disks and flat-panel displays von Mount, David J

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A SUPERCRITICAL FLUID CLEANING SYSTEM AND METHOD von MOUNT, DAVID, J

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METHOD FOR RELEASING AND DRYING MOVEABLE ELEMENTS OF MICRO-ELECTRONIC MECHANICAL STRUCTURES WITH ORGANIC THIN FILM SACRIFICIAL LAYERS von MOUNT, DAVID, J

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Adding energy to a cleaning process fluid for removing photo resist, residues and particles from semiconductor substrates, photo masks, reticles, disks and flat-panel displays von MOUNT DAVID J

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Method for releasing and drying moveable elements of micro-electronic mechanical structures with organic thin film sacrificial layers von MOUNT DAVID J

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Supercritical fluid cleaning process for precision surfaces von MOUNT DAVID J

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ENHANCED ETCHING/SMOOTHING OF DIELECTRIC SURFACES von DYKSTRA, JERALD P, MOUNT, DAVID J., SR, SKINNER, WESLEY J, KIRKPATRICK, ALLEN R

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Considerations When Purchasing a Portable Helium Leak Detector von Mount, David J

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Considerations when purchasing a portable helium leak detector: look for these features before making a decision von Mount, David J

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Trends in leak testing: advancing the state-of-the-art von Mount, David J

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Trends in leak testing: learn more about automatic leak testing for automotive components and assemblies von Mount, David J

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Trends in Leak Testing von Mount, David J

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ENHANCED ETCHING/SMOOTHING OF DIELECTRIC SURFACES von DYKSTRA, JERALD P, MOUNT, DAVID J., SR, SKINNER, WESLEY J, KIRKPATRICK, ALLEN R

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SUPERCRITICAL FLUID DELIVERY SYSTEM FOR SEMICONDUCTOR WAFER PROCESSING von MORITZ HEIKO D, MOUNT DAVID J, DOUGLAS STEPHEN B, POPE KEITH R, WHITE RICK C

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LOADBEARING PLATFORM WITH FLUID SUPPORT, ISOLATION AND ROTATION von POPE, KEITH, BUSBY, CLIFTON, MOUNT, DAVID, J, WHITE, RICK, C, ROTHMAN, LAURA, DOW, RYAMOND, J, III

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Loadbearing platform with fluid support, isolation and rotation von BUSBY CLIFTON, MOUNT DAVID J, DOW RAYMOND J.III, ROTHMAN LAURA, POPE KEITH, WHITE RICK C

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Method and apparatus for rotation of a workpiece in supercritical fluid solutions for removing photo resist, residues and particles therefrom von BUSBY CLIFTON, MOUNT DAVID J, ROTHMAN LAURA, DOWW, III RAYMOND J, DOUGLAS STEPHEN B, POPE KEITH, WHITE RICK C

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Method and apparatus for rotation of a workpiece in supercritical fluid solutions for removing photo resist, residues and particles therefrom von Pope, Keith, Mount, David J, Rothman, Laura, White, Rick C, Busby, Clifton, Douglas, Stephen B, Doww, III, Raymond J

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