Oblique angle deposition of Au/Ti porous getter films von Wu, Ming, Moulin, Johan, Bosseboeuf, Alain

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Combining ferromagnetic resonator and digital image correlation to study the strain induced resonance tunability in magnetoelectric heterostructures von Zighem, Fatih, Belmeguenai, Mohamed, Faurie, Damien, Haddadi, Halim, Moulin, Johan

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Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication Considerations von Shi, Zhichao, Martincic, Emile, Moulin, Johan, Lefeuvre, Elie, Lamarque, Frédéric

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Micro-strip ferromagnetic resonance study of strain-induced anisotropy in amorphous FeCuNbSiB film on flexible substrate von Zighem, Fatih, El Bahoui, Anouar, Moulin, Johan, Faurie, Damien, Belmeguenai, Mohamed, Mercone, Silvana, Haddadi, Halim

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Low temperature activation of Au/Ti getter film for application to wafer-level vacuum packaging von Wu, Ming, Moulin, Johan, Lani, Sébastien, Hallais, Géraldine, Renard, Charles, Bosseboeuf, Alain

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Effect of Environment on Activation and Sorption of Getter Alloys and Multilayers for Hybrid Wafer-level Vacuum Packaging von Bosseboeuf, Alain, Lemettre, Sylvain, Wu, Ming, Moulin, Johan, Coste, Philippe, Bessouet, Clement, Hammami, Sana, Renard, Charles, Vincent, Laetitia

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Induced exchange bias in NiMn/CoFe multilayer thin films sputtered on a quartz substrate by field cooling von Mauc, Charles, Perrier, Thomas, Moulin, Johan, Kayser, Patrick

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Micropatterning of sandwiched FeCuNbSiB/Cu/FeCuNbSiB for the realization of magneto-impedance microsensors von Moulin, Johan, Woytasik, Marion, Shahosseini, Iman, Alves, Francisco

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Zr-Ti getter film integration in MEMS vacuum packaging von Lemettre, Sylvain, Bessouet, Clément, Aassime, Abdelhanin, Coste, Philippe, Bosseboeuf, Alain, Moulin, Johan

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Zr-Ti getter film integration in MEMS packaging von Lemettre, Sylvain, Bessouet, Clément, Aassime, A., Coste, Philippe, Bosseboeuf, Alain, Moulin, Johan

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In-situ electrical characterization of co-evaporated Zr–Ti, Zr–V and Zr–Co thin getter films during thermal activation von Lemettre, Sylvain, Hammami, Sana, Bosseboeuf, Alain, Coste, Philippe, Moulin, Johan

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Erratum: “Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation” [J. Vac. Sci. Technol. B 39, 054202 (2021)] von Bessouet, Clément, Lemettre, Sylvain, Kutyla, Charlotte, Bosseboeuf, Alain, Coste, Philippe, Sauvage, Thierry, Lecoq, Hélène, Wendling, Olivier, Bellamy, Aurélien, Jagtap, Piyush, Escoubas, Stéphanie, Guichet, Christophe, Thomas, Olivier, Moulin, Johan

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Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation (vol 39, 054202, 2021) von Bessouet, Clement, Lemettre, Sylvain, Kutyla, Charlotte, Bosseboeuf, Alain, Coste, Philippe, Sauvage, Thierry, Lecoq, Helene, Wendling, Olivier, Bellamy, Aurelien, Jagtap, Piyush, Escoubas, Stephanie, Guichet, Christophe, Thomas, Olivier, Moulin, Johan

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Multilayer Thin Film Getter for Sustainable Vacuum in MEMS Packaging von Wu, M., Moulin, J., Bosseboeuf, A.

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Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation von Bessouet, Clément, Lemettre, Sylvain, Kutyla, Charlotte, Bosseboeuf, Alain, Coste, Philippe, Sauvage, Thierry, Lecoq, Hélène, Wendling, Olivier, Bellamy, Aurélien, Jagtap, Piyush, Escoubas, Stéphanie, Guichet, Christophe, Thomas, Olivier, Moulin, Johan

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Low temperature solid–liquid interdiffusion wafer and die bonding based on PVD thin Sn/Cu films von Lemettre, Sylvain, Seok, Seonho, Isac, Nathalie, Moulin, Johan, Bosseboeuf, Alain

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Hydrogen sorption in yttrium-based getter thin films von Kutyla, Charlotte, Bessouet, Clément, Lemettre, Sylvain, Leroy, Laetitia, Bosseboeuf, Alain, Coste, Philippe, Sauvage, Thierry, Wendling, Olivier, Bellamy, Aurélien, Jagtap, Piyush, Escoubas, Stéphanie, Guichet, Christophe, Thomas, Olivier, Moulin, Johan

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Multilayer Thin Film Getter for Sustainable Vacuum in MEMS Packaging von Wu, Ming, Moulin, Johan, Bosseboeuf, Alain

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Optimization and Microfabrication of High Performance Silicon-Based MEMS Microspeaker von Shahosseini, I., Lefeuvre, E., Moulin, J., Martincic, E., Woytasik, M., Lemarquand, G.

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Preface-JES Focus Issue on 4D Materials and Systems von Mukundan, Rangachary, Furukawa, Hidemitsu, Milano, Giuseppe, Matsui, Hiroyuki, Yoshida, Tsukasa, Sukumaran, Sathish K., Koehne, Jessica, Hesketh, Peter, Razeeb, Kafil M., Magagnin, Luca, Khosla, Ajit, Moulin, Johan

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