Dry Etching of High-k Dielectric Thin Films in HBr/Ar Plasma von Kim, Dong-Pyo, Kim, Gwan-Ha, Woo, Jong-Chang, Kim, Hwan-Jun, Kim, Chang-Il, Lee, Cheol-In, Lee, Sewung-Kwon, Jung, Tae-Woo, Moon, Seung-Chan, Park, Sang-Wook

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Dry etching of CoFe films using a CH4∕Ar inductively coupled plasma for magnetic random access memory application von Um, Doo-Seung, Kim, Dong-Pyo, Woo, Jong-Chang, Kim, Chang-Il, Lee, Sung-Kwon, Jung, Tae-Woo, Moon, Seung-Chan

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The Need of Top Anti-reflective Coating Materials for ArF Immersion Lithography von Jung, Jae Chang, Lee, Geunsu, Lee, Sung Koo, Ban, Keun Do, Bok, Cheolkyu, Moon, Seung Chan

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Highly scalable Z-RAM with remarkably long data retention for DRAM application von Tae-Su Jang, Joong-Sik Kim, Sang-Min Hwang, Young-Hoon Oh, Kwang-Myung Rho, Seoung-Ju Chung, Su-Ock Chung, Jae-Geun Oh, Bhardwaj, S., Jungtae Kwon, Kim, D., Nagoga, M., Yong-Taik Kim, Seon-Yong Cha, Seung-Chan Moon, Sung-Woong Chung, Sung-Joo Hong, Sung-Wook Park

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Highly Scalable Saddle-Fin (S-Fin) Transistor for Sub-50nm DRAM Technology von Park, Sung-Wook, Hong, Sung-Joo, Kim, Jin-Woong, Jeong, Jae-Goan, Yoo, Kyung-Dong, Moon, Seung-Chan, Sohn, Hyun-Chul, Kwak, Noh-Jung, Cho, Yun-Seok, Baek, Seung-Joo, Park, Hyung-Soon, Yoon, Hyo Geun, Lee, Bong-Hoon, Kim, Jin-Soo, Hwang, Sun-Hwan, Lee, Lae-Hee, Cho, Heung-Jae, Cho, Sung Yoon, Chung, Chai-O, Kim, Kwang-Ok, Yoo, Min-Soo, Jang, Se-Aug, Lee, Sang-Don, Chung, Sung-Woong

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Bulk Effects of Thermal Flow Resists von sang-kon kim, 오혜근(HANYANG, Cheol-Kyu Bok, 안일신, Seung-Chan Moon, Sung-Muk Lee

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Dry etching of CoFe films using a C H 4 ∕ Ar inductively coupled plasma for magnetic random access memory application von Um, Doo-Seung, Kim, Dong-Pyo, Woo, Jong-Chang, Kim, Chang-Il, Lee, Sung-Kwon, Jung, Tae-Woo, Moon, Seung-Chan

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Dry etching of CoFe films using a C H 4 ∕ Ar inductively coupled plasmafor magnetic random access memory application von Um, Doo-Seung, Kim, Dong-Pyo, Woo, Jong-Chang, Kim, Chang-Il, Lee, Sung-Kwon, Jung, Tae-Woo, Moon, Seung-Chan

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Bird-mimetic Wing System of Flapping-wing Micro Air Vehicle with Autonomous Flight Control Capability von Widhiarini, Sriyulianti, Park, Ji Hwan, Yoon, Bum Soo, Yoon, Kwang Joon, Paik, Il-Hyun, Kim, Jong Heon, Park, Chan Yik, Jun, Seung Moon, Nam, Changho

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Database management system and encryption method performed in database von MOON CHAN SEUNG

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EUV Comprehensive inspection apparatus and methods for EUV lithography processes and pinhole modules von MOON SEUNG CHAN, CHOI JIN HYUK, AHN JINHO, LEE DONGGI

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High-resolution mask inspection device and method using coherence control of extreme ultraviolet light source and pinhole device for mask inspection von MOON SEUNG CHAN, CHOI JIN HYUK, AHN JINHO, LEE DONGGI

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EUV Apparatus and method for EUV blank mask inspection von MOON SEUNG CHAN, CHOI JIN HYUK, AHN JINHO, LEE DONGGI

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EUV EUV Device and method for measuring the phase shift amount of EUV light and the refractive coefficient of EUV specimens von MOON SEUNG CHAN, CHOI JIN HYUK, AHN JINHO, LEE DONGGI

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DATABASE MANAGEMENT SYSTEM AND ENCRYPTION METHOD PERFORMED IN DATABASE von MOON CHAN SEUNG

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THE INTEGRATED PAYMENT SYSTEM USING A PLURALITY OF KIOSK TERMINALS AND POS TERMINALS von MOON, SEUNG CHAN, KWON YONG SOON

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HIGH VOLTAGE CONNECTOR von MOON, SEUNG CHAN

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SHIELD SHELL STRUCTURE FOR CONNECTOR von MOON, SEUNG CHAN

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Apparatus and method for mask inspection for extreme ultraviolet lithography processes capable of high resolution mask images von DONG GI LEE, JIN HO AHN, JIN HYUK CHOI, SEUNG CHAN MOON

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A manufacturing method of double encapsulated biodegradable polymer microsphere and the injection composition containing the same von MOON SEUNG CHAN, CHOI SEONG YOUNG, JEONG MIN WOOK

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