Thermal Behavior of Biaxial Piezoelectric MEMS-Scanners von Mollard, Laurent, Dieppedale, Christel, Hamelin, Antoine, Rhun, Gwenael Le, Hue, Jean, Frey, Laurent, Castellan, Gael

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Active optical phased array integrated within a micro-cantilever von Guerber, Sylvain, Fowler, Daivid, Mollard, Laurent, Dieppedale, Christel, Le Rhun, Gwenael, Hamelin, Antoine, Faugier-Tovar, Jonathan, Abdoul-Carime, Kim

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KNN lead-free technology on 200 mm Si wafer for piezoelectric actuator applications von Kuentz, Hugo, Dieppedale, Christel, Mollard, Laurent, Liechti, Romain, Campo, Alain, Hamelin, Antoine, Demange, Valérie, Poulain, Christophe, Guilloux-Viry, Maryline, Le Rhun, Gwenaël

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Piezoelectric Layer Transfer Process for MEMS von Gwenael Le Rhun, Franklin Pavageau, Timothée Rotrou, Christel Dieppedale, Laurent Mollard

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Biaxial Piezoelectric MEMS Mirrors with Low Absorption Coating for 1550 nm Long-Range LIDAR von Mollard, L, Riu, J, Royo, S, Dieppedale, C, Hamelin, A, Koumela, A, Verdot, T, Frey, L, Le Rhun, G, Castellan, G, Licitra, C

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Thermal Behavior of Biaxial Piezoelectric MEMS Scanner von Laurent Mollard, Christel Dieppedale, Antoine Hamelin, François Gardien, Gwenael Le Rhun, Jean Hue, Laurent Frey, Gael Castellan

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Short-Wave Infrared HgCdTe Avalanche Photodiodes von Rothman, Johan, Mollard, Laurent, Bosson, Sylvie, Vojetta, Gautier, Foubert, Kevin, Gatti, Sylvain, Bonnouvrier, Gwladys, Salveti, Frederic, Kerlain, Alexandre, Pacaud, Olivier

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History-Dependent Impact Ionization Theory Applied to HgCdTe e-APDs von Rothman, Johan, Mollard, Laurent, Goût, Sylvain, Bonnefond, Leo, Wlassow, Jerôme

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Study of the Transit-Time Limitations of the Impulse Response in Mid-Wave Infrared HgCdTe Avalanche Photodiodes von Perrais, Gwladys, Derelle, Sophie, Mollard, Laurent, Chamonal, Jean-Paul, Destefanis, Gerard, Vincent, Gilbert, Bernhardt, Sylvie, Rothman, Johan

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ELECTROMECHANICAL MICROSYSTEM von SAINT-PATRICE, Damien, NICOLAS, Stéphane, MOLLARD, Laurent

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Electromechanical microsystem von Nicolas, Stéphane, Mollard, Laurent, Saint-Patrice, Damien

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Electromechanical microsystem von Nicolas, Stéphane, Mollard, Laurent, Saint-Patrice, Damien

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Device and methods for the transfer of chips from a source substrate onto a destination substrate von Mollard, Laurent, Caplet, Stéphane

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ELECTROMECHANICAL MICROSYSTEM von SAINT-PATRICE, Damien, NICOLAS, Stéphane, MOLLARD, Laurent

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ELECTROMECHANICAL MICROSYSTEM von SAINT-PATRICE, Damien, NICOLAS, Stéphane, MOLLARD, Laurent

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DEVICE AND METHODS FOR TRANSFERRING CHIPS FROM A SOURCE SUBSTRATE TO A DESTINATION SUBSTRATE von CAPLET, Stéphane, MOLLARD, Laurent

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Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator von Benbalagh, Rabah, André, Jean-Michel, Barchewitz, Robert, Jonnard, Philippe, Julié, Gwénaelle, Mollard, Laurent, Rolland, Guy, Rémond, Christian, Troussel, Philippe, Marmoret, Rémy, Filatova, Elena O.

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ELECTROMECHANICAL MICROSYSTEM von SAINT-PATRICE, Damien, NICOLAS, Stéphane, MOLLARD, Laurent

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Mechanical microsystem and associated manufacturing method von Hilt, Thierry, Mollard, Laurent, Dieppedale, Christel

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Optical scanner von Fowler, Daivid, Mollard, Laurent, Fanget, Stéphane, Hue, Jean, Dieppedale, Christel

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