SEMICONDUCTOR STRUCTURE MANUFACTURING PROCESS von ZHILIN L.M, MATOVNIKOV V.A, BUR'BA V.V, SHEIN JU.F

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METHOD OF MANUFACTURING SILICON INTEGRAL CIRCUITS WITH DIELECTRIC INSULATION OF MEMBERS von DOLGIKH S.I, BRYUKHNO N.A, KOMAROV YU.A, MATOVNIKOV V.A, KONOVALOVA E.V, DANTSEV O.N

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METHOD OF MANUFACTURING EPITAXIAL SILICON STRUCTURES von MATOVNIKOV V.A, OGNEV V.V, BRJUKHNO N.A, POLOVENKO V.T

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METHOD OF DISPLACING CILICIC MONOCRYSTAL PEDESTAL BASE von DOLGIKH S.I, MATOVNIKOV V.A, CHETVERIKOV A.M, BAKUN V.N, OGNEV V.V, BRJUKHNO N.A

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